KrF excimer laser deposition of titanium thin films on silicon substrates

1998 ◽  
Author(s):  
Luowen Lu ◽  
Yongfeng Lu ◽  
Minghui Hong ◽  
T. M. Ho ◽  
Tohsiew Low
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Laser Deposition ◽  
Silicon Substrates ◽  
Titanium Thin Films ◽  
Krf Excimer Laser

Carbon nitride thin films prepared by nitrogen ion assisted pulsed laser deposition of graphite using KrF excimer laser

1999 ◽  
Vol 339 (1-2) ◽  
pp. 38-43 ◽  
Author(s):  
Kazuhiro Yamamoto ◽  
Yoshinori Koga ◽  
Shuzo Fujiwara ◽  
Fumio Kokai ◽  
Jacob I. Kleiman ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Excimer Laser ◽  
Carbon Nitride ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Nitrogen Ion ◽  
Krf Excimer Laser

Pulsed excimer laser deposition and characterization of ferroelectric Pb(Zr0.52Ti0.48)O3 thin films

1992 ◽  
Vol 7 (9) ◽  
pp. 2521-2529 ◽  
Author(s):  
D. Roy ◽  
S.B. Krupanidhi
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Lead Zirconate Titanate ◽  
Fatigue Behavior ◽  
Lead Zirconate ◽  
Laser Deposition ◽  
Silicon Substrates ◽  
Excimer Laser Ablation ◽  
Pzt Films

Lead zirconate titanate (PZT) thin films were prepared by excimer laser ablation on platinum coated silicon substrates. The composition of the films showed dependence on the fluence at low energy densities (<2 J/cm2), and less dependence on the ablation fluence was observed beyond a fluence of 2 J/cm2. A correlation among the fluence, ablation pressure, and substrate temperature has been established. Crystalline perovskite PZT films showed a dielectric constant of 800–1000, a remnant polarization of 32 μC/cm2, and a coercive field of 130 kV/cm. Films showed fatigue behavior that may be used in a device, and a close comparison of fatigue behavior between the films deposited at different energy densities indicated a better fatigue behavior for a fluence of 4 J/cm2.

Plasma diagnostics in KrF excimer laser deposition of Ti thin films

1998 ◽  
Author(s):  
Minghui Hong ◽  
Yongfeng Lu ◽  
T. M. Ho ◽  
Luowen Lu ◽  
Tohsiew Low
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Plasma Diagnostics ◽  
Laser Deposition ◽  
Krf Excimer Laser

Synthesis of p-type ZnO thin films using co-doping techniques based on KrF excimer laser deposition

2003 ◽  
Vol 435 (1-2) ◽  
pp. 49-55 ◽  
Author(s):  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara ◽  
Jes Asmussen ◽  
RajK. Thareja
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Laser Deposition ◽  
Zno Thin Films ◽  
Co Doping ◽  
Krf Excimer Laser ◽  
P Type

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser

Low-energy femtosecond pulsed laser deposition of cerium (IV) oxide thin films on silicon substrates

2021 ◽  
pp. 126323
Author(s):  
Joseph A. De Mesa ◽  
Angelo P. Rillera ◽  
Melvin John F. Empizo ◽  
Nobuhiko Sarukura ◽  
Roland V. Sarmago ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Low Energy ◽  
Laser Deposition ◽  
Silicon Substrates ◽  
Oxide Thin Films ◽  
Femtosecond Pulsed Laser

Computer Simulation of Pulsed Laser Ablation for YBaCuO Superconducting Films

1990 ◽  
Vol 191 ◽  
Author(s):  
Toshiyuki Nakamiya ◽  
Kenji Ebihara ◽  
P. K. John ◽  
B. Y. Tong
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Laser Energy ◽  
Pulsed Laser ◽  
The Finite Element Method ◽  
High Tc ◽  
One Dimensional ◽  
Incident Laser Energy ◽  
Krf Excimer Laser ◽  
Pulsed Laser Irradiation

ABSTRACTThe dynamics of melting and ablation of high Tc YBa2Cu3O7-x superconducting thin films flashed by a pulsed KrF excimer laser(λ=248nm) or a pulsed Nd-YAG laser (λ =1.06μ m) were studied numerically. The fundamental model during a pulsed laser irradiation was a one-dimensional heat conduction equation. The finite element method was applied to solve the equation including the temperature dependence of the thermal conductivity of YBaCuO thin films. In addition, the microstructure of YBa2Cu3O7-x bulk(l.5mm thick) flashed by a pulsed XeCl excimer laser (λ =308nm) was investigated by scanning electron microscopy (SEM) in order to estimate the threshold incident laser energy density for surface melting and ablation. The good agreements between the numerical calculations and the experimental results were obtained.

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