Chemically amplified ArF resists based on cleavable alicyclic group and the absorption band shift method

1998 ◽  
Author(s):  
Naomi Shida ◽  
Takeshi Okino ◽  
Koji Asakawa ◽  
Tohru Ushirogouchi ◽  
Makoto Nakase
Keyword(s):  
Absorption Band ◽  
Band Shift ◽  
Shift Method ◽  
Chemically Amplified

scholarly journals Resists Using the Absorption Band Shift Method for ArF Excimer Laser Lithography.

1998 ◽  
Vol 11 (3) ◽  
pp. 489-492
Author(s):  
Takeshi Okino ◽  
Koji Asakawa ◽  
Naomi Shida ◽  
Tohru Ushirogouchi
Keyword(s):  
Absorption Band ◽  
Excimer Laser ◽  
Band Shift ◽  
Shift Method ◽  
Laser Lithography ◽  
Arf Excimer Laser

Chemically ampilified ArF excimer laser resists using the absorption band shift method

1995 ◽  
Author(s):  
Makoto Nakase ◽  
Takuya Naito ◽  
Koji Asakawa ◽  
Akinori Hongu ◽  
Naomi Shida ◽  
...  
Keyword(s):  
Absorption Band ◽  
Excimer Laser ◽  
Band Shift ◽  
Shift Method ◽  
Arf Excimer Laser

Highly Transparent Chemically Amplified ArF Excimer Laser Resists by Absorption Band Shift for 193 nm Wavelength

1994 ◽  
Vol 33 (Part 1, No. 12B) ◽  
pp. 7028-7032 ◽  
Author(s):  
Takuya Naito ◽  
Koji Asakawa ◽  
Naomi Shida ◽  
Tohru Ushirogouchi ◽  
Makoto Nakase
Keyword(s):  
Absorption Band ◽  
Excimer Laser ◽  
Band Shift ◽  
Chemically Amplified ◽  
Arf Excimer Laser ◽  
193 Nm

Conformational change of protein cytochrome b-562 adsorbed on colloidal gold particles; absorption band shift

1997 ◽  
pp. 605-606 ◽  
Author(s):  
H. S. Zhou ◽  
S. Aoki ◽  
I. Honma ◽  
M. Hirasawa ◽  
T. Nagamune ◽  
...  
Keyword(s):  
Absorption Band ◽  
Conformational Change ◽  
Cytochrome B ◽  
Colloidal Gold ◽  
Band Shift ◽  
Gold Particles

scholarly journals Thin Films of Nanocrystalline Fe(pz)[Pt(CN)4] Deposited by Resonant Matrix-Assisted Pulsed Laser Evaporation

Materials ◽  
2021 ◽  
Vol 14 (23) ◽  
pp. 7135
Author(s):  
Dominik Maskowicz ◽  
Rafał Jendrzejewski ◽  
Wioletta Kopeć ◽  
Maria Gazda ◽  
Jakub Karczewski ◽  
...  
Keyword(s):  
Thin Films ◽  
Absorption Band ◽  
Spin Transition ◽  
Pulsed Laser ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Laser Evaporation ◽  
Band Shift ◽  
X Ray ◽  
Vis Spectroscopy

Prior studies of the thin film deposition of the metal-organic compound of Fe(pz)Pt[CN]4 (pz = pyrazine) using the matrix-assisted pulsed laser evaporation (MAPLE) method, provided evidence for laser-induced decomposition of the molecular structure resulting in a significant downshift of the spin transition temperature. In this work we report new results obtained with a tunable pulsed laser, adjusted to water resonance absorption band with a maximum at 3080 nm, instead of 1064 nm laser, to overcome limitations related to laser–target interactions. Using this approach, we obtain uniform and functional thin films of Fe(pz)Pt[CN]4 nanoparticles with an average thickness of 135 nm on Si and/or glass substrates. X-ray diffraction measurements show the crystalline structure of the film identical to that of the reference material. The temperature-dependent Raman spectroscopy indicates the spin transition in the temperature range of 275 to 290 K with 15 ± 3 K hysteresis. This result is confirmed by UV-Vis spectroscopy revealing an absorption band shift from 492 to 550 nm related to metal-to-ligand-charge-transfer (MLCT) for high and low spin states, respectively. Spin crossover is also observed with X-ray absorption spectroscopy, but due to soft X-ray-induced excited spin state trapping (SOXIESST) the transition is not complete and shifted towards lower temperatures.

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