Titanium nitride film prepared by ion-beam-enhanced deposition and its properties
1997 ◽
Vol 88
(1-3)
◽
pp. 127-131
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1999 ◽
Vol 17
(2)
◽
pp. 416
◽
2003 ◽
Vol 32
(8)
◽
pp. 890-898
◽
Keyword(s):
2006 ◽
Vol 8
(1)
◽
pp. 173-178
◽
Keyword(s):
Keyword(s):
Keyword(s):