Titanium Nitride Film Prepared by DC Titanium-Arc Plasma-Based Ion Implantation in Nitrogen.
1991 ◽
Vol 111
(12)
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pp. 1071-1076
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Keyword(s):
2002 ◽
Vol 156
(1-3)
◽
pp. 170-175
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2003 ◽
Vol 206
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pp. 745-748
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1999 ◽
Vol 17
(2)
◽
pp. 416
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2003 ◽
Vol 32
(8)
◽
pp. 890-898
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Keyword(s):
2006 ◽
Vol 8
(1)
◽
pp. 173-178
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Keyword(s):
Keyword(s):
Keyword(s):