Audible acoustic wave real-time monitoring in laser processing of microelectronic materials

1997 ◽  
Author(s):  
Minghui Hong ◽  
Yongfeng Lu ◽  
Wen D. Song ◽  
Daming Liu ◽  
Tohsiew Low
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Laser Processing ◽  
Real Time Monitoring ◽  
Microelectronic Materials

A Novel Surface Acoustic Wave Biosensor for Real-Time Monitoring of Cell Contractile Properties

2020 ◽  
Vol MA2020-01 (27) ◽  
pp. 1970-1970
Author(s):  
Xinwei Wei ◽  
Junyu Zhang ◽  
Liujing Zhuang ◽  
Hao Wan ◽  
Ping Wang
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Surface Acoustic Wave ◽  
Contractile Properties ◽  
Real Time Monitoring ◽  
Acoustic Wave Biosensor

Real-time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor

2004 ◽  
Author(s):  
Chi-Yuan Lee ◽  
Tsung-Tsong Wu ◽  
Yung-Yu Chen ◽  
Ying-Chou Cheng ◽  
Wen-Jong Chen ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Surface Acoustic Wave ◽  
Wet Etching ◽  
Silicon Membrane ◽  
Real Time Monitoring ◽  
Acoustic Wave Sensor

Real-Time Monitoring for Laser Surface Cleaning

1994 ◽  
Vol 354 ◽  
Author(s):  
Y.F. Lu ◽  
M.H. Hong ◽  
Y. Aoyagi
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Laser Irradiation ◽  
Frequency Spectrum ◽  
Acoustic Waves ◽  
Surface Condition ◽  
Surface Cleaning ◽  
Laser Cleaning ◽  
Cleaning Process ◽  
Real Time Monitoring

AbstractReal-time monitoring of surface cleanness in laser dry cleaning was investigated by monitoring the acoustic waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Besides the surface condition, the acoustic waveforms also depend on the substrate materials and laser pulse energies (intensities). The frequency spectrum obtained from the Fourier transform can provide clear indication for different surface cleanness. Removing of surface contaminants can generally result in weaker laser-induced acoustic wave and change in the frequency spectrum. The surface cleanness, therefore, can be monitored in real-time by detecting the amplitude and frequency of the acoustic wave during the laser cleaning process. This phenomenon provides the laser cleaning technique a real-time feedback during the cleaning process.

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