Scattered-light alignment system using SiC mask for x-ray lithography

1997 ◽  
Author(s):  
Tsutomu Miyatake ◽  
Masaoki Hirose ◽  
Tsutomu Shoki ◽  
Ryo Ohkubo ◽  
Kuniaki Yamazaki
Keyword(s):  
Scattered Light ◽  
X Ray ◽  
Alignment System

Advanced X-Ray Alignment System

1986 ◽  
Author(s):  
B. S. Fay ◽  
W. T. Novak
Keyword(s):  
X Ray ◽  
Alignment System

X-Ray Lithography Alignment System

1984 ◽  
Author(s):  
B Fay ◽  
W T. Novak
Keyword(s):  
X Ray ◽  
Title X ◽  
Alignment System

Automatic X-Ray Alignment System For Submicron VLSI Printing

1984 ◽  
Author(s):  
B Fay ◽  
W T. Novak ◽  
I Carlsson
Keyword(s):  
X Ray ◽  
Alignment System

scholarly journals The relationship between X-ray and optical absorbers in active galactic nuclei

2020 ◽  
Vol 493 (1) ◽  
pp. 930-939 ◽  
Author(s):  
Gunnar W Jaffarian ◽  
C Martin Gaskell
Keyword(s):  
Active Galactic Nuclei ◽  
Column Density ◽  
Scattered Light ◽  
Galactic Nuclei ◽  
Broad Line ◽  
Large Scatter ◽  
Standard Type ◽  
X Ray

ABSTRACT We present a large compilation of reddening estimates from broad-line Balmer decrements for active galactic nuclei (AGNs) with measured X-ray column densities. The median reddening is E(B − V) ≈ 0.77 ± 0.10 for type-1 to type-1.9 AGNs with reported column densities. This is notably higher than the median reddening of AGNs from the SDSS. We attribute this to the selection bias of the SDSS towards blue AGNs. For other AGNs, we find evidence of a publication bias against reporting low column densities. We find a significant correlation between NH and E(B − V) but with a large scatter of ±1 dex. On average, the X-ray columns are consistent with those predicted from E(B − V) for a solar neighbourhood dust-to-gas ratio. We argue that the large scatter of column densities and reddenings can be explained by X-ray column density variability. For AGNs with detectable broad-line regions (BLRs) that have undergone significant changes of Seyfert type (‘changing-look’ AGNs), we do not find any statistically significant differences in NH or E(B − V) compared to standard type-1 to type-1.9 AGNs. There is no evidence for any type-1 AGNs being Compton thick. We also analyse type-2 AGNs and find no significant correlation between NH and narrow-line region reddening. We find no evidence for a previously claimed anticorrelation. The median column density of LINERs is 22.68 ± 0.75 compared to a column density of 22.90 ± 0.28 for type-2 AGNs. We find the majority of low column density type-2 AGNs are LINERs, but NH is probably underestimated because of scattered light.

Alignment and overlay accuracy of an advanced x-ray stepper using an improved alignment system (Poster Paper)

1992 ◽  
Author(s):  
F. Gabeli ◽  
Hans L. Huber ◽  
A. Kucinski ◽  
H.-U. Scheunemann ◽  
Klaus Simon ◽  
...  
Keyword(s):  
X Ray ◽  
Alignment System ◽  
Poster Paper
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