Alignment and overlay accuracy of an advanced x-ray stepper using an improved alignment system (Poster Paper)

1992 ◽  
Author(s):  
F. Gabeli ◽  
Hans L. Huber ◽  
A. Kucinski ◽  
H.-U. Scheunemann ◽  
Klaus Simon ◽  
...  
Keyword(s):  
X Ray ◽  
Alignment System ◽  
Poster Paper

Advanced X-Ray Alignment System

1986 ◽  
Author(s):  
B. S. Fay ◽  
W. T. Novak
Keyword(s):  
X Ray ◽  
Alignment System

X-Ray Lithography Alignment System

1984 ◽  
Author(s):  
B Fay ◽  
W T. Novak
Keyword(s):  
X Ray ◽  
Title X ◽  
Alignment System

Scattered-light alignment system using SiC mask for x-ray lithography

1997 ◽  
Author(s):  
Tsutomu Miyatake ◽  
Masaoki Hirose ◽  
Tsutomu Shoki ◽  
Ryo Ohkubo ◽  
Kuniaki Yamazaki
Keyword(s):  
Scattered Light ◽  
X Ray ◽  
Alignment System

Automatic X-Ray Alignment System For Submicron VLSI Printing

1984 ◽  
Author(s):  
B Fay ◽  
W T. Novak ◽  
I Carlsson
Keyword(s):  
X Ray ◽  
Alignment System

Performances of the CXrL x-ray beamlines (Poster Paper)

1992 ◽  
Author(s):  
Richard K. Cole III ◽  
Paul D. Anderson ◽  
Gregory M. Wells ◽  
Eric Brodsky ◽  
Kuniaki Yamazaki ◽  
...  
Keyword(s):  
X Ray ◽  
Poster Paper

A wide‐range alignment system for x‐ray lithography

1981 ◽  
Vol 19 (4) ◽  
pp. 1219-1223 ◽  
Author(s):  
D. A. Nelson ◽  
V. Dimilia ◽  
J. M. Warlaumont
Keyword(s):  
X Ray ◽  
Alignment System ◽  
Wide Range ◽  
Range Alignment
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