Study of high throughput EUV mask pattern inspection technologies using multi e-beam optics

2021 ◽  
Author(s):  
Tadayuki Sugimori ◽  
Riki Ogawa ◽  
Hidekazu Takekoshi ◽  
John G. Hartley ◽  
David J. Pinckney ◽  
...  
Keyword(s):  
High Throughput ◽  
Mask Pattern ◽  
Beam Optics

Study of high throughput EUV mask pattern inspection technologies using multi e-Beam optics

2021 ◽  
Author(s):  
Tadayuki Sugimori ◽  
Riki Ogawa ◽  
Hidekazu Takekoshi ◽  
John G. Hartley ◽  
David J. Pinckeny ◽  
...  
Keyword(s):  
High Throughput ◽  
Mask Pattern ◽  
Beam Optics

Development of extreme ultraviolet mask pattern inspection technology using projection electron beam optics

2013 ◽  
Vol 12 (2) ◽  
pp. 021003 ◽  
Author(s):  
Ryoichi Hirano ◽  
Hidehiro Watanabe ◽  
Susumu Iida ◽  
Tsuyoshi Amano ◽  
Tsuneo Terasawa ◽  
...  
Keyword(s):  
Electron Beam ◽  
Extreme Ultraviolet ◽  
Mask Pattern ◽  
Beam Optics

scholarly journals Design of multi-beam optics for high throughput parallel processing

2020 ◽  
Vol 32 (1) ◽  
pp. 012005 ◽  
Author(s):  
Oskar Hofmann ◽  
Jochen Stollenwerk ◽  
Peter Loosen
Keyword(s):  
Parallel Processing ◽  
High Throughput ◽  
Beam Optics

154: Integration of TPSA and High-Throughput Mass Spectrometry Data Improves Prostate Cancer Prediction

2007 ◽  
Vol 177 (4S) ◽  
pp. 52-53
Author(s):  
Stefano Ongarello ◽  
Eberhard Steiner ◽  
Regina Achleitner ◽  
Isabel Feuerstein ◽  
Birgit Stenzel ◽  
...  
Keyword(s):  
Prostate Cancer ◽  
Mass Spectrometry ◽  
High Throughput ◽  
Mass Spectrometry Data ◽  
Cancer Prediction
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