Advances in defect performance in metal oxide photoresists for EUV lithography

2021 ◽  
Author(s):  
Stephen T. Meyers ◽  
Jan Doise ◽  
Michael Kocsis ◽  
Shu-Hao Chang ◽  
Benjamin L. Clark ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Euv Lithography

28nm pitch single exposure patterning readiness by metal oxide resist on 0.33NA EUV lithography

2021 ◽  
Author(s):  
Danilo De Simone ◽  
Luka Kljucar ◽  
Poulomi Das ◽  
Romuald Blanc ◽  
Christophe Beral ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Single Exposure ◽  
Euv Lithography

New developments in ligand-stabilized metal oxide nanoparticle photoresists for EUV lithography

2015 ◽  
Author(s):  
Christopher Ober ◽  
Jing Jiang ◽  
Ben Zhang ◽  
Li Li ◽  
Emmanuel Giannelis ◽  
...  
Keyword(s):  
Metal Oxide ◽  
New Developments ◽  
Metal Oxide Nanoparticle ◽  
Euv Lithography ◽  
Oxide Nanoparticle

Decarboxylation efficiency of carboxylic acids as ligands of metal oxide nanocluster resists upon γ-ray irradiation

2022 ◽  
Author(s):  
Tomoe Otsuka ◽  
Yusa Muroya ◽  
Takuya Ikeda ◽  
Yoshitaka Komuro ◽  
Daisuke Kawana ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Carboxylic Acids ◽  
Extreme Ultraviolet ◽  
Material Design ◽  
Reaction Scheme ◽  
Radical Addition ◽  
Euv Lithography ◽  
Radiation Induced ◽  
Γ Ray ◽  
Dissociative State

Abstract Metal oxide nanocluster resists have recently attracted considerable attention for use in extreme ultraviolet (EUV) lithography. To obtain sophisticated guidelines for material design, it is necessary to understand well the radiation-induced chemical reaction scheme including the insolubilization mechanism. In this study, the production of CO2, which is considered to be one of the end products of treatment with an ionizing radiation, was investigated for eight types of carboxylic acid under various conditions using -rays (60Co) as a radiation source. The amount of CO2 produced was measured by gas chromatography (GC). GCO2 (/100 eV), which indicates decarboxylation efficiency, was evaluated. CO2 was generated through electron addition, hole transfer, and hydroxyl radical addition to the molecular and ionic forms of carboxylic acids. The dependences of GCO2 on reaction partners were clarified. The dependences of GCO2 on the molecular structure and dissociative state of carboxylic acids were also clarified.

Existence of Cubic ZrO2 at 300°C on Bulk Zirconium

1969 ◽  
Vol 27 ◽  
pp. 166-167
Author(s):  
R.A. Ploc
Keyword(s):  
Metal Oxide ◽  
Metal Substrate ◽  
Preferred Orientation ◽  
Monoclinic Zirconia ◽  
Epitaxial Relationship

The manner in which ZrO2 forms on zirconium at 300°C in air has been discussed in the first reference. In short, monoclinic zirconia nucleates and grows with a preferred orientation relative to the metal substrate. The mode of growth is not well understood since an epitaxial relationship which gives minimum misfit between the zirconium ions in the metal/oxide combination is not realized. The reason may be associated with a thin cubic or tetragonal layer of ZrO2 between the inner oxygen saturated metal and the outer monoclinic zirconia.

Recent advancement in the electrocatalytic synthesis of ammonia

Nanoscale ◽  
2020 ◽  
Vol 12 (15) ◽  
pp. 8065-8094 ◽  
Author(s):  
Xudong Wen ◽  
Jingqi Guan
Keyword(s):  
Metal Oxide ◽  
Oxide Catalysts ◽  
Single Atom ◽  
Metal Oxide Catalysts ◽  
Metal Free ◽  
Recent Advancement ◽  
Nanocomposite Catalysts

Different kinds of electrocatalysts used in NRR electrocatalysis (including single atom catalysts, metal oxide catalysts, nanocomposite catalysts, and metal free catalysts) are introduced.

Routes of metal oxide formation from metal β-diketonates used as CVD precursors

1999 ◽  
Vol 09 (PR8) ◽  
pp. Pr8-65-Pr8-72 ◽  
Author(s):  
A. E. Turgambaeva ◽  
V. V. Krisyuk ◽  
A. F. Bykov ◽  
I. K. Igumenov
Keyword(s):  
Metal Oxide ◽  
Oxide Formation

STRUCTURE OF METAL-OXIDE INTERFACES

1985 ◽  
Vol 46 (C4) ◽  
pp. C4-135-C4-140 ◽  
Author(s):  
M. Leseur ◽  
B. Pieraggi
Keyword(s):  
Metal Oxide ◽  
Oxide Interfaces ◽  
Structure Of Metal

METAL-OXIDE INTERFACES OBTAINED BY SELECTIVE CHEMICAL REDUCTION OF LAMELLAR OXIDE-OXIDE EUTECTIC STRUCTURES

1990 ◽  
Vol 51 (C1) ◽  
pp. C1-781-C1-787
Author(s):  
B. BONVALOT ◽  
G. DHALENNE ◽  
F. MILLOT ◽  
A. REVCOLEVSCHI
Keyword(s):  
Metal Oxide ◽  
Chemical Reduction ◽  
Oxide Interfaces ◽  
Selective Chemical
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