Marangoni effect-based under-layer for a Dual Damascene via-first approach: a scalable solution to the unwanted photoresist swing effect

2020 ◽  
Author(s):  
Valentina Dall'Asta ◽  
Emma Litterio ◽  
Nicoletta Corneo ◽  
Jakub Koza ◽  
Jonathan Jeauneau ◽  
...  
Keyword(s):  
Marangoni Effect ◽  
Dual Damascene

Experimental Characterization of the Reliability of 3-Terminal Dual-Damascene Copper Interconnect Trees

2002 ◽  
Vol 716 ◽  
Author(s):  
C. L. Gan ◽  
C. V. Thompson ◽  
K. L. Pey ◽  
W. K. Choi ◽  
F. Wei ◽  
...  
Keyword(s):  
Stress Conditions ◽  
Experimental Characterization ◽  
Contact Lines ◽  
Tree Structures ◽  
Similar Test ◽  
Dual Damascene ◽  
Copper Interconnect ◽  
Test Conditions

AbstractElectromigration experiments have been carried out on simple Cu dual-damascene interconnect tree structures consisting of straight via-to-via (or contact-to-contact) lines with an extra via in the middle of the line. As with Al-based interconnects, the reliability of a segment in this tree strongly depends on the stress conditions of the connected segment. Beyond this, there are important differences in the results obtained under similar test conditions for Al-based and Cu-based interconnect trees. These differences are thought to be associated with variations in the architectural schemes of the two metallizations. The absence of a conducting electromigrationresistant overlayer in Cu technology, and the possibility of liner rupture at stressed vias lead to significant differences in tree reliabilities in Cu compared to Al.

Dual Damascene Process for FatWires in Copper/FSG Technology

2003 ◽  
Vol 766 ◽  
Author(s):  
J. Gambino ◽  
T. Stamper ◽  
H. Trombley ◽  
S. Luce ◽  
F. Allen ◽  
...  
Keyword(s):  
Line Width ◽  
Lower Cost ◽  
Process Window ◽  
Cmos Process ◽  
Dual Damascene ◽  
Damascene Process ◽  
Interconnect Technology

AbstractA trench-first dual damascene process has been developed for fat wires (1.26 μm pitch, 1.1 μm thickness) in a 0.18 μm CMOS process with copper/fluorosilicate glass (FSG) interconnect technology. The process window for the patterning of vias in such deep trenches depends on the trench depth and on the line width of the trench, with the worse case being an intermediate line width (lines that are 3X the via diameter). Compared to a single damascene process, the dual damascene process has comparable yield and reliability, with lower via resistance and lower cost.

Inorganic Si-O-C Antireflection Coating at 193 nm for Cu Dual Damascene Process

2003 ◽  
Vol 150 (1) ◽  
pp. G58 ◽  
Author(s):  
Sang-Yun Lee ◽  
Yong-Bae Kim ◽  
Jeong Soo Byun
Keyword(s):  
Antireflection Coating ◽  
Dual Damascene ◽  
Damascene Process ◽  
193 Nm

On the Role of Marangoni Effects on the Critical Heat Flux for Pool Boiling of Binary Mixtures

1996 ◽  
Vol 118 (1) ◽  
pp. 103-109 ◽  
Author(s):  
W. R. McGillis ◽  
V. P. Carey
Keyword(s):  
Surface Tension ◽  
Heat Flux ◽  
Binary Mixtures ◽  
Critical Heat Flux ◽  
Full Range ◽  
Pool Boiling ◽  
Marangoni Effect ◽  
Restoring Force ◽  
Marangoni Effects

The Marangoni effect on the critical heat flux (CHF) condition in pool boiling of binary mixtures has been identified and its effect has been quantitatively estimated with a modified model derived from hydrodynamics. The physical process of CHF in binary mixtures, and models used to describe it, are examined in the light of recent experimental evidence, accurate mixture properties, and phase equilibrium revealing a correlation to surface tension gradients and volatility. A correlation is developed from a heuristic model including the additional liquid restoring force caused by surface tension gradients. The CHF condition was determined experimentally for saturated methanol/water, 2-propanol/water, and ethylene glycol/water mixtures, over the full range of concentrations, and compared to the model. The evidence in this study demonstrates that in a mixture with large differences in surface tension, there is an additional hydrodynamic restoring force affecting the CHF condition.

scholarly journals Engineering motile aqueous phase-separated droplets via liposome stabilisation

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Shaobin Zhang ◽  
Claudia Contini ◽  
James W. Hindley ◽  
Guido Bolognesi ◽  
Yuval Elani ◽  
...  
Keyword(s):  
Aqueous Phase ◽  
Marangoni Effect ◽  
Living Systems ◽  
Biological Processes ◽  
Biological Applications ◽  
Emulsion System ◽  
Biotechnological Potential ◽  
New Directions ◽  
Directional Motion ◽  
The Stability

AbstractThere are increasing efforts to engineer functional compartments that mimic cellular behaviours from the bottom-up. One behaviour that is receiving particular attention is motility, due to its biotechnological potential and ubiquity in living systems. Many existing platforms make use of the Marangoni effect to achieve motion in water/oil (w/o) droplet systems. However, most of these systems are unsuitable for biological applications due to biocompatibility issues caused by the presence of oil phases. Here we report a biocompatible all aqueous (w/w) PEG/dextran Pickering-like emulsion system consisting of liposome-stabilised cell-sized droplets, where the stability can be easily tuned by adjusting liposome composition and concentration. We demonstrate that the compartments are capable of negative chemotaxis: these droplets can respond to a PEG/dextran polymer gradient through directional motion down to the gradient. The biocompatibility, motility and partitioning abilities of this droplet system offers new directions to pursue research in motion-related biological processes.

scholarly journals CFD-based modelling of phase transformation in laser welded low-carbon steel

2021 ◽  
Author(s):  
Aleksander Siwek
Keyword(s):  
Heat Source ◽  
Phase Transformations ◽  
Power Distribution ◽  
Low Carbon Steel ◽  
Marangoni Effect ◽  
Phase Changes ◽  
Test Material ◽  
Low Carbon ◽  
Welding Condition ◽  
Welding Pool

AbstractThis paper presents a numerical model of the laser welding of steel, taking into account the heat and mass flows, as well as thermal effects associated with phase transformations. It was assumed that the heat source is a laser with a symmetrical power distribution of the TEM10 beam in two welding condition variants: a stationary heat source and a source moving at a constant speed along the sample. After reaching the melting temperature, the movement of the liquid phase was forced by the Marangoni effect acting on the surface of the welding pool. For the laser power applied, the surface of the welding pool was assumed to be flat. It was proposed an algorithm for the forecasting of the phase changes during heating and cooling. Diffusive phase transformations during cooling were modelled using Johnson-Mehl-Avrami-Kolmogorov (JMAK) equations. Diffusionless transformations occurring when cooling rates exceed the critical ones were modelled using Koistinen-Marburger (KM) equations. Calculations were made for a rectangular sample welded in air and cooled spontaneously in the atmosphere. The boundary conditions were simulated assuming a constant coefficient of heat exchange and radiation to the environment. The start and end time of the changes occurring in the cooling phase were calculated based on the average cooling rate in the temperature range 800–500°C (v8/5). The model was tested for the test material: S355J2 steel.

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