Digital holography for quantification of semiconductor structures (Conference Presentation)

Author(s):  
Vismay Trivedi ◽  
Nimit Patel ◽  
Mugdha Joglekar ◽  
Vani Chhaniwal ◽  
Seonoh Lee ◽  
...  
2016 ◽  
Author(s):  
Markus Finkeldey ◽  
Falk Schellenberg ◽  
Nils C. Gerhardt ◽  
Christof Paar ◽  
Martin R. Hofmann

2020 ◽  
Vol 59 (SO) ◽  
pp. SOOE03
Author(s):  
Hiroyuki Ishigaki ◽  
Takahiro Mamiya ◽  
Yoshio Hayasaki

Author(s):  
Jae-Eun Pi ◽  
Ji-Hun Choi ◽  
Jong-Heon Yang ◽  
Chi-Young Hwang ◽  
Gi Heon Kim ◽  
...  

2004 ◽  
Vol 38 (12) ◽  
pp. 1390-1393
Author(s):  
V. A. Terekhov ◽  
A. N. Man’ko ◽  
E. N. Bormontov ◽  
V. N. Levchenko ◽  
S. Yu. Trebunskikh ◽  
...  

2019 ◽  
Vol 2019 ◽  
pp. 1-6
Author(s):  
Davood Khodadad

We present a digital holographic method to increase height range measurement with a reduced phase ambiguity using a dual-directional illumination. Small changes in the angle of incident illumination introduce phase differences between the recorded complex fields. We decrease relative phase difference between the recorded complex fields 279 and 139 times by changing the angle of incident 0.5° and 1°, respectively. A two cent Euro coin edge groove is used to measure the shape. The groove depth is measured as ≈300  μm. Further, numerical refocusing and analysis of speckle displacements in two different planes are used to measure the depth without a use of phase unwrapping process.


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