Line roughness improvements on EUV 36nm pitch pattern by plasma treatment method

2019 ◽  
Author(s):  
Toshiharu Wada ◽  
Chia-Yun Hsieh ◽  
Akiteru Ko ◽  
Peter Biolsi
Keyword(s):  
Plasma Treatment ◽  
Treatment Method ◽  
Pitch Pattern

scholarly journals Non-Thermal Plasma-Modified Ru-Sn-Ti Catalyst for Chlorinated Volatile Organic Compound Degradation

Catalysts ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 1456
Author(s):  
Yujie Fu ◽  
You Zhang ◽  
Qi Xin ◽  
Zhong Zheng ◽  
Yu Zhang ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Photoelectron Spectroscopy ◽  
High Surface ◽  
High Surface Area ◽  
Surface Oxidation ◽  
Treatment Method ◽  
X Ray ◽  
Chlorinated Volatile Organic Compounds ◽  
Volatile Organic ◽  
Doped Titania

Chlorinated volatile organic compounds (CVOCs) are vital environmental concerns due to their low biodegradability and long-term persistence. Catalytic combustion technology is one of the more commonly used technologies for the treatment of CVOCs. Catalysts with high low-temperature activity, superior selectivity of non-toxic products, and resistance to chlorine poisoning are desirable. Here we adopted a plasma treatment method to synthesize a tin-doped titania loaded with ruthenium dioxide (RuO2) catalyst, possessing enhanced activity (T90%, the temperature at which 90% of dichloromethane (DCM) is decomposed, is 262 °C) compared to the catalyst prepared by the conventional calcination method. As revealed by transmission electron microscopy, X-ray diffraction, N2 adsorption, X-ray photoelectron spectroscopy, and hydrogen temperature-programmed reduction, the high surface area of the tin-doped titania catalyst and the enhanced dispersion and surface oxidation of RuO2 induced by plasma treatment were found to be the main factors determining excellent catalytic activities.

Treatment technology of carbon fibers under electromagnetic effects of different nature for production of high-durable carbon-filled plastics

2021 ◽  
Vol 0 (2) ◽  
pp. 2-6
Author(s):  
V. A. Nelyub ◽  
◽  
I. A. Komarov ◽  
Keyword(s):  
Ultraviolet Radiation ◽  
Plasma Treatment ◽  
Adhesion Strength ◽  
Carbon Fibers ◽  
Cold Plasma ◽  
Mechanical Characteristics ◽  
Treatment Method ◽  
Interfacial Shear ◽  
Treatment Technology ◽  
Electromagnetic Methods

The effect of pretreatment technologies of carbon fibers by different electromagnetic methods on their mechanical characteristics has been examined. The methods of cold plasma and ultraviolet radiation were used. Such a treatment improves adhesion strength of a metal coating with fibers for production of carbon-filled plastics with high interfacial shear durability. By experiments it has been found out that the plasma treatment method is the most effective. The study and experiment results are presented.

scholarly journals Structural and Phase Changes in the System Al-Si-Ti-B, Synthesized Using the Electron-Ion-Plasma Treatment Method

2017 ◽  
Vol 189 ◽  
pp. 012031
Author(s):  
A A Klopotov ◽  
E A Petrikova ◽  
Yu F Ivanov ◽  
A D Teresov ◽  
N N Cherenda ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Treatment Method ◽  
Phase Changes ◽  
Ion Plasma

Development of Stable a-Si Solar Cells with Wide-Gap a-Si:H i-layers Deposited by an Inert Gas Plasma Treatment Method

1998 ◽  
Vol 37 (Part 1, No. 3A) ◽  
pp. 771-775
Author(s):  
Eiji Maruyama ◽  
Yoshihiro Hishikawa ◽  
Makoto Tanaka ◽  
Seiichi Kiyama ◽  
Shinya Tsuda
Keyword(s):  
Solar Cells ◽  
Plasma Treatment ◽  
Treatment Method ◽  
Inert Gas ◽  
Si Solar Cells ◽  
Gas Plasma ◽  
Wide Gap

Improvement in a-Si:H Properties by Inert Gas Plasma Treatment

1996 ◽  
Vol 420 ◽  
Author(s):  
E. Maruyama ◽  
Y. Hishikawa ◽  
M. Tanaka ◽  
S. Kiyama ◽  
S. Tsuda
Keyword(s):  
Plasma Treatment ◽  
Surface Reaction ◽  
Treatment Method ◽  
Inert Gas ◽  
Rf Plasma ◽  
Plasma Cvd ◽  
Gas Plasma ◽  
Free Process ◽  
Wide Range ◽  
First Time

AbstractThe modification of surface reactions with an inert gas plasma treatment method has been investigated for the first time in order to improve the properties of a-Si:H for solar cells. The deposition of a thin a-Si:H layer and exposure to inert gas plasma such as He, Ar or Xe were repeated by using RF plasma CVD at a substrate temperature of 200 °C. It has been found that the hydrogen content (CH) can be controlled in a wide range from about 18 atomic% to about 35 atomic%, although it is a hydrogen-free process. Experimental results show that the change in CH of a-Si:H films is mainly determined by the decrease in CH of the treated a-Si:H surface and the increase in CH of the a-Si:H deposited on the treated surface. Furthermore, the plasma treatment probably promotes the surface reaction, which reduces SiH2ISiH and CH. Consequently, wide-gap (1.64 eV by ( a h ν )1/3 versus h ν plots, 1.75 - 1.85 eV by Tauc's plot) a-Si:H films with high stabilized photoconductivity (> 10-5 Ω-1cm-1 under AM-1, 100 mW/cm2 irradiation) have been obtained by the inert gas plasma treatment method.

Covalent linker-free immobilization of conjugatable oligonucleotides on polypropylene surfaces

RSC Advances ◽  
2016 ◽  
Vol 6 (86) ◽  
pp. 83328-83336 ◽  
Author(s):  
Clara T. H. Tran ◽  
Michael Craggs ◽  
Lee M. Smith ◽  
Keith Stanley ◽  
Alexey Kondyurin ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Polymer Surface ◽  
Treatment Method

A novel plasma treatment method was used to activate a polymer surface for oligonucleotide immobilization.

Treatment of Natural Zeolites for Increasing the Sorption Capacity

2016 ◽  
Vol 871 ◽  
pp. 70-75 ◽  
Author(s):  
Mihail Bruyako ◽  
Larisa Grigorieva ◽  
Aleksandra Grigorieva ◽  
Irina Ivanova
Keyword(s):  
Plasma Treatment ◽  
Sorption Capacity ◽  
Mineralogical Composition ◽  
Treatment Method ◽  
Natural Zeolites ◽  
High Effectiveness ◽  
Ion Plasma ◽  
Modified Zeolites ◽  
Determination Of Activity

This article describes the results ofthe research on determination of activity and sorption capacity of modified zeolites. Activation processes of sorbents were compared including thermal dehydration and ion-plasma treatment of zeolites. Mineralogical composition of investigated zeolites as well as the results of ion-plasma treatment on the structure of natural zeolites are presented. The obtained results have shown high effectiveness of ion-plasma treatmentof sorbents compared with thermal treatment method.

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