Improving accuracy of high precision displacement measurement system with optical pickup head by using differential astigmatism focus error detection
Keyword(s):
2014 ◽
Vol 599-601
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pp. 684-688
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2012 ◽
Vol 83
(11)
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pp. 113703
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Keyword(s):
1991 ◽
Vol 57
(10)
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pp. 1744-1748