High-resolution repair of photomasks using a deep-UV-laser-based defect repair system

1995 ◽  
Author(s):  
John W. Herman ◽  
Yung-Ho Chuang ◽  
Baorui Yang ◽  
Minchuan Wang ◽  
Stephen P. Palese
Keyword(s):  
High Resolution ◽  
Repair System ◽  
Uv Laser ◽  
Defect Repair ◽  
Deep Uv

High-resolution deep-UV laser mask repair based on near-field optical technology

1996 ◽  
Author(s):  
Klony S. Lieberman ◽  
Hanan Terkel ◽  
Michael Rudman ◽  
A. Ignatov ◽  
Aaron Lewis
Keyword(s):  
High Resolution ◽  
Near Field ◽  
Uv Laser ◽  
Optical Technology ◽  
Deep Uv

Rigid biodegradable photopolymer structures of high resolution using deep-UV laser photocuring

2011 ◽  
Vol 21 (5) ◽  
pp. 054007 ◽  
Author(s):  
F Brandi ◽  
F Anjum ◽  
L Ceseracciu ◽  
A C Barone ◽  
A Athanassiou
Keyword(s):  
High Resolution ◽  
Uv Laser ◽  
Deep Uv

LIF DETECTION OF TRACE SPECIES IN WATER USING DIFFERENT UV LASER WAVELENGTHS

2007 ◽  
Vol 17 (04) ◽  
pp. 689-695
Author(s):  
ANNA V. SHARIKOVA ◽  
DENNIS K. KILLINGER
Keyword(s):  
Detection System ◽  
Chemical Species ◽  
Excitation Wavelength ◽  
Uv Laser ◽  
Interference Filters ◽  
Trace Species ◽  
Dissolved Organic Compounds ◽  
Deep Uv ◽  
Uv Lasers ◽  
Uv Excitation

We have conducted studies of deep UV laser-induced fluorescence (LIF) for the reagentless detection of trace species and Dissolved Organic Compounds (DOC's) in water. Our LIF detection system had two interchangeable UV lasers, 266 nm and 355 nm, illuminating a flow cell containing a water sample. The fluorescence emitted at 90 degrees to the laser beam was collected by focusing optics, passed through cut-off and interference filters with 21 optical bandpass channels (240–680 nm ), and detected by a photomultiplier tube (PMT). The samples analyzed by the system included bottled, tap and river water; we have also worked with biological and chemical species (Bacillus Globigii, malathion). In terms of the excitation wavelength, it was observed that the deep UV excitation resulted in spectra that contained more features, and had better separation of the LIF from the Raman peak, thus enhancing the detection of unique spectral features.

scholarly journals Deep UV laser induced periodic surface structures on silicon formed by self-organization of nanoparticles

2020 ◽  
Vol 520 ◽  
pp. 146307 ◽  
Author(s):  
Raul Zazo ◽  
Javier Solis ◽  
José A. Sanchez-Gil ◽  
Rocio Ariza ◽  
Rosalia Serna ◽  
...  
Keyword(s):  
Surface Structures ◽  
Self Organization ◽  
Uv Laser ◽  
Periodic Surface ◽  
Deep Uv

Effect of deep UV laser treatment on silicon‐doped Tin oxide thin film

2019 ◽  
Vol 28 (2) ◽  
pp. 194-203
Author(s):  
Yuxi Deng ◽  
Xianzhe Liu ◽  
Weijian Yuan ◽  
Honglong Ning ◽  
Sha Tao ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Treatment ◽  
Tin Oxide ◽  
Oxide Thin Film ◽  
Uv Laser ◽  
Deep Uv ◽  
Silicon Doped

Nanosecond and Femtosecond UV Laser Ablation of CdTe (100): Time-Of-Flight and Angular Distributions

1993 ◽  
Vol 334 ◽  
Author(s):  
P.D. Brewer ◽  
M. Späth ◽  
M. Stuke
Keyword(s):  
Laser Ablation ◽  
High Resolution ◽  
Mass Spectrometer ◽  
Multiphoton Ionization ◽  
Time Of Flight ◽  
Picosecond Laser ◽  
Laser Pulses ◽  
Dye Laser ◽  
Angular Distributions ◽  
Uv Laser

AbstractAngularly resolved time-of-flight (TOF) measurements have been used to probe the velocity and angular distributions of Cd atoms and Te2 molecules ejected from CdTe (100) substrates under irradiation by 248 nm nanosecond and sub-picosecond laser pulses. These experiments employ a dye laser TOF mass spectrometer with resonance enhanced multiphoton ionization for sensitive, high resolution detection of the desorbed products. The velocity distributions are well described by Maxwell-Boltzmann distributions for low fluence nanosecond (<60 mJ/cm2) and sub-picosecond (<3.3 mJ/cm2) pulses. Angular flux distributions for nanosecond irradiation are observed to be highly forward peaked about the surface normal, whereas, for sub-picosecond irradiation the distribution approaches cos3θ.

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