Shin-Etsu super-high-flat substrate for FPD panel photomask
Keyword(s):
2004 ◽
Keyword(s):
Dynamic detachment of a gas bubble from a solid flat substrate performing normal harmonic vibrations
2011 ◽
Vol 52
(5)
◽
pp. 783-790
◽
2013 ◽
Vol 477-478
◽
pp. 21-24
Keyword(s):