Line roughness improvements on self-aligned quadruple patterning by wafer stress engineering

2018 ◽  
Author(s):  
Soo Doo Chae ◽  
Tsuyoshi Moriya ◽  
Shimpei Tsujikawa ◽  
Kiyotaka Imai ◽  
Eric Liu ◽  
...  
Keyword(s):  
Stress Engineering

Stress Engineering Using Si3N4 for Stiction Free Release of SOI Beams

2014 ◽  
pp. 491-493
Author(s):  
Suman A. Gupta ◽  
Apoorva Shenoy ◽  
Monisha ◽  
V. Uma ◽  
M. N. Vijayaraghavan ◽  
...  
Keyword(s):  
Stress Engineering

Residual Stress Engineering in Fatigue Resistant Welds

2013 ◽  
Vol 768-769 ◽  
pp. 613-619
Author(s):  
Majid Farajian ◽  
Zuheir Barsoum ◽  
Arne Kromm
Keyword(s):  
Residual Stress ◽  
Residual Stresses ◽  
Body Of Knowledge ◽  
Fatigue Design ◽  
Welding Technology ◽  
Stress Engineering ◽  
Solid Foundation ◽  
Stress States ◽  
The Many ◽  
Quantitative Consideration

The developments in the field of residual stress determination during the last decades have contributed to a better understanding of the origins and sources of residual stresses in different engineering disciplines. The many investigations concerning the behavior of residual stresses under mechanical loading have also provided a solid foundation to clarify the important aspects of residual stresses and fatigue. The question that arises now is if this available body of knowledge is being used effectively in the field of welding technology to design and construct structures with better fatigue performances. In this paper the necessity of the development of the concept residual stress engineering for welds in which wanted residual stress states are tailored for specific cases by appropriate means will be discussed. The possibilities of the quantitative consideration of the benefits in the fatigue design codes will be presented in a practical example.

Stress Engineering of Backend Metallization

2006 ◽  
pp. 1061-1066
Author(s):  
Chia Lan Goh ◽  
Alvaro Maury ◽  
Iskandar Idris Yaacob
Keyword(s):  
Stress Engineering

Three-dimensional stress engineering in FinFETs for mobility/on-current enhancement and gate current reduction

2008 ◽  
Author(s):  
Masumi Saitoh ◽  
Akio Kaneko ◽  
Kimitoshi Okano ◽  
Tomoko Kinoshita ◽  
Satoshi Inaba ◽  
...  
Keyword(s):  
Three Dimensional ◽  
Gate Current ◽  
Stress Engineering ◽  
Current Reduction
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