Optical properties of SiOxNy thin films prepared by ion beam assisted deposition
1997 ◽
Vol 127-128
◽
pp. 557-561
◽
2012 ◽
Vol 61
(10)
◽
pp. 1609-1614
◽
2002 ◽
Vol 13
(2)
◽
pp. 105-112