Mueller matrix spectroscopic ellipsometry based scatterometry simulations of Si and Si/SixGe1-x/Si/SixGe1-x/Si fins for sub-7nm node gate-all-around transistor metrology

2018 ◽  
Author(s):  
Madhulika Korde ◽  
Sonal Dey ◽  
Alain Diebold ◽  
Nick Keller
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Mueller Matrix

Interpretation of azimuthal angle dependence of periodic gratings in Mueller matrix spectroscopic ellipsometry

2015 ◽  
Vol 32 (4) ◽  
pp. 604 ◽  
Author(s):  
Anett Heinrich ◽  
Jörg Bischoff ◽  
Kurt Meiner ◽  
Uwe Richter ◽  
Thomas Mikolajick ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Azimuthal Angle ◽  
Mueller Matrix ◽  
Angle Dependence ◽  
Periodic Gratings

Experimental validation of the partial coherence model in spectroscopic ellipsometry and Mueller matrix polarimetry

2017 ◽  
Vol 421 ◽  
pp. 656-662 ◽  
Author(s):  
M. Miranda-Medina ◽  
E. Garcia-Caurel ◽  
A. Peinado ◽  
M. Stchakovsky ◽  
K. Hingerl ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Experimental Validation ◽  
Mueller Matrix ◽  
Partial Coherence

Mueller matrix spectroscopic ellipsometry: formulation and application

2004 ◽  
Vol 455-456 ◽  
pp. 43-49 ◽  
Author(s):  
A. Laskarakis ◽  
S. Logothetidis ◽  
E. Pavlopoulou ◽  
M. Gioti
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Mueller Matrix

Optical constants of electroplated Bi2Te3 films by Mueller matrix spectroscopic ellipsometry

2008 ◽  
Vol 516 (10) ◽  
pp. 2922-2927 ◽  
Author(s):  
A. Zimmer ◽  
M. Stchakovsky ◽  
N. Stein ◽  
L. Johann ◽  
C. Eypert ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Mueller Matrix

scholarly journals Birefringence of nanocrystalline chitin films studied by Mueller-matrix spectroscopic ellipsometry

2016 ◽  
Vol 6 (2) ◽  
pp. 671 ◽  
Author(s):  
A. Mendoza-Galván ◽  
E. Muñoz-Pineda ◽  
K. Järrendahl ◽  
H. Arwin
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Mueller Matrix
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