Holographic tracking of quantized intra-film segments during interferometric laser processing of SiOx thin films (Conference Presentation)

Author(s):  
Stephen Ho ◽  
Matthias Domke ◽  
Heinz P. Huber ◽  
Peter R. Herman
Keyword(s):  
2016 ◽  
Vol 382 ◽  
pp. 178-191 ◽  
Author(s):  
A. Daskalova ◽  
Chandra S.R. Nathala ◽  
P. Kavatzikidou ◽  
A. Ranella ◽  
R. Szoszkiewicz ◽  
...  

1996 ◽  
Vol 449 ◽  
Author(s):  
W. S. Wong ◽  
L. F. Schloss ◽  
G.S. Sudhir ◽  
B. P. Linder ◽  
K-M. Yu ◽  
...  

ABSTRACTA KrF (248 nm) excimer laser with a 38 ns pulse width was used to study pulsed laser annealing of AIN/GaN bi-layers and dopant activation of Mg-implanted GaN thin films. For the AIN/GaN bi-layers, cathodoluminescence (CL) showed an increase in the intensity of the GaN band-edge peak at 3.47 eV after pulsed laser annealing at an energy density of 2000 mJ/cm2. Rutherford backscattering spectrometry of a Mg-implanted A1N (75 nm thick)/GaN (1.0 μm thick) thin-film heterostructure showed a 20% reduction of the 4He+ backscattering yield after laser annealing at an energy density of 400 mJ/cm2. CL measurements revealed a 410 nm emission peak indicating the incorporation of Mg after laser processing.


2005 ◽  
Vol 247 (1-4) ◽  
pp. 434-439 ◽  
Author(s):  
V. Khomchenko ◽  
L. Fedorenko ◽  
N. Yusupov ◽  
V. Rodionov ◽  
Yu. Bacherikov ◽  
...  
Keyword(s):  

2017 ◽  
Vol 397 ◽  
pp. 152-158 ◽  
Author(s):  
Eric Breckenfeld ◽  
Heungsoo Kim ◽  
Edward P. Gorzkowski ◽  
Thomas E. Sutto ◽  
Alberto Piqué

1990 ◽  
Vol 5 (4) ◽  
pp. 529-548 ◽  
Author(s):  
R.C. Estler ◽  
S. Foltyn ◽  
A.R. Garcia ◽  
R.E. Muenchausen ◽  
N.S. Nogar ◽  
...  

2004 ◽  
Author(s):  
Gennady M. Mikheev ◽  
Ruslan G. Zonov ◽  
Dmitry G. Kaluzhny

2010 ◽  
Vol 1268 ◽  
Author(s):  
Ashish Bhatia ◽  
Phillip Dale ◽  
Matt Nowell ◽  
Michael Scarpulla

AbstractCuInSe2 (CIS) is commercially processed using energy intensive vacuum processes such as sputtering and thermal evaporation followed by thermal annealing. In order to reduce the cost of fabricating CIS photovoltaic absorber layers we need fast and cheap processing methods. We have investigated the use of non-vacuum electrochemical deposition (ED) followed by ultra violet pulsed laser annealing (UV-PLA). We report here on the results of ns pulsed KrF irradiation of ED CIS films and ED CIS films which were first annealed in a Se atmosphere.


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