Design on electromagnetic actuator of aerostatic bearing stylus displacement sensor
2017 ◽
2017 ◽
Vol 232
(2)
◽
pp. 155-165
2008 ◽
Vol 128
(4)
◽
pp. 289-297
◽
2010 ◽
Vol 130
(9)
◽
pp. 818-824
2019 ◽
Vol 19
(21)
◽
pp. 9680-9687
◽