Optical and electrical properties of transition metal nitride films produced by reactive cathodic arc deposition and reactive rf sputtering
2013 ◽
Vol 48
(10)
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pp. 3789-3797
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2000 ◽
Vol 18
(4)
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pp. 1718-1723
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Keyword(s):
2011 ◽
Vol 27
(5)
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pp. 857-862
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1999 ◽
Vol 349
(1-2)
◽
pp. 176-185
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2006 ◽
Vol 421
(1-2)
◽
pp. 182-190
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Keyword(s):