Thermal field emission sources and optics for Gaussian electron-beam lithography

1995 ◽  
Author(s):  
Tom Chisholm ◽  
Bernard A. Wallman ◽  
Johannes C. Romijn
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Electron Beam Lithography ◽  
Thermal Field ◽  
Emission Sources

Nanodiamod lateral device field emission diode fabricated by electron beam lithography

2010 ◽  
Vol 19 (2-3) ◽  
pp. 252-255 ◽  
Author(s):  
X.C. LeQuan ◽  
B.K. Choi ◽  
W.P. Kang ◽  
J.L. Davidson
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Electron Beam Lithography

Evaluation of a 100 kV thermal field emission electron-beam nanolithography system

2000 ◽  
Vol 18 (6) ◽  
pp. 3089 ◽  
Author(s):  
D. M. Tennant ◽  
R. Fullowan ◽  
H. Takemura ◽  
M. Isobe ◽  
Y. Nakagawa
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Thermal Field ◽  
Emission Electron

Microstructural gated field emission sources for electron-beam applications (Poster Paper)

1992 ◽  
Author(s):  
Gary W. Jones ◽  
Ching T. Sune ◽  
Susan K. Jones ◽  
Henry F. Gray
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Emission Sources ◽  
Poster Paper

Lateral Silicon Field-Emission Devices using Electron Beam Lithography

2000 ◽  
Vol 39 (Part 1, No. 5A) ◽  
pp. 2556-2559 ◽  
Author(s):  
Sangyeon Han ◽  
Sun-a Yang ◽  
Taekeun Hwang ◽  
Jongho Lee ◽  
Jong Duk Lee ◽  
...  
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Electron Beam Lithography ◽  
Field Emission Devices
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