WGP structures patterned by Lloyd's mirror laser interference lithography system integrate into MEMS physical sensor device

2016 ◽  
Author(s):  
Kuo-Chun Tseng ◽  
Shuo-Ting Hong ◽  
Te-Hsun Lin ◽  
Tzu-Han Chuang ◽  
Chien-Chung Fu
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Sensor Device ◽  
Physical Sensor ◽  
Lithography System

Prism-Based Laser Interference Lithography System for Simple Multibeam Interference Lithography

2020 ◽  
Vol 12 (3) ◽  
pp. 398-402
Author(s):  
Jun Han Park ◽  
Dan Hee Yun ◽  
Yong Won Ma ◽  
Cheong Yeol Gwak ◽  
Bo Sung Shin
Keyword(s):  
Optical Fibers ◽  
Optical System ◽  
Beam Splitter ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Precise Control ◽  
Multibeam Interference ◽  
Line Patterns ◽  
Lithography System

Laser interference lithography is a powerful technique of subwavelength-scale patterning. However, this technique requires a complicated optical system, the precise control and complexity of which increases exponentially with increasing number of beams. In this study, a compact prism-based laser interference lithography system using optical fibers and a prism was proposed to simplify the technique. In this system, the beam splitter and mirrors in a typical laser interference lithography system were replaced by a designed prism, and the pattern could be easily changed by only changing the prism, without other modification, irrespective of the number of beams required. In addition, because the laser and the laser interference lithography system are connected by an optical fiber, the system can be moved easily and flexibly. The fabrication of various submicroscale line patterns, holes, and dot patterns with a 270–1400 nm pitch was achieved using the proposed laser interference lithography system.

Periodic patterning using multi-facet prism based laser interference lithography

Laser Physics ◽  
2009 ◽  
Vol 19 (3) ◽  
pp. 505-510 ◽  
Author(s):  
R. Sidharthan ◽  
F. Chollet ◽  
V. M. Murukeshan
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference

Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations

2021 ◽  
pp. 2150459
Author(s):  
Xiangxian Wang ◽  
Tianxu Jia ◽  
Jiankai Zhu ◽  
Yingwen Su ◽  
Liping Zhang ◽  
...  
Keyword(s):  
Manufacturing Industry ◽  
Structural Parameters ◽  
Interference Lithography ◽  
Polarization Angle ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Micro Structure ◽  
Periodic Patterns ◽  
Beam Laser ◽  
Micro Structures

In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.

scholarly journals UV-Laser Interference Lithography for Local Functionalization of Plasmonic Nanostructures with Responsive Hydrogel

2020 ◽  
Vol 124 (5) ◽  
pp. 3297-3305 ◽  
Author(s):  
Nestor Gisbert Quilis ◽  
Simone Hageneder ◽  
Stefan Fossati ◽  
Simone K. Auer ◽  
Priyamvada Venugopalan ◽  
...  
Keyword(s):  
Interference Lithography ◽  
Plasmonic Nanostructures ◽  
Laser Interference Lithography ◽  
Uv Laser ◽  
Laser Interference
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