Improved multi-beam laser interference lithography system by vibration analysis model

2017 ◽  
Author(s):  
Te Hsun Lin ◽  
Yin-Kuang Yang ◽  
Hsuan-Ying Mai ◽  
Chien-Chung Fu
Keyword(s):  
Vibration Analysis ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Analysis Model ◽  
Beam Laser ◽  
Lithography System

Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations

2021 ◽  
pp. 2150459
Author(s):  
Xiangxian Wang ◽  
Tianxu Jia ◽  
Jiankai Zhu ◽  
Yingwen Su ◽  
Liping Zhang ◽  
...  
Keyword(s):  
Manufacturing Industry ◽  
Structural Parameters ◽  
Interference Lithography ◽  
Polarization Angle ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Micro Structure ◽  
Periodic Patterns ◽  
Beam Laser ◽  
Micro Structures

In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.

Fabrication of hydrophobic structures on coronary stent surface based on direct three-beam laser interference lithography

2016 ◽  
Vol 12 (3) ◽  
pp. 233-236 ◽  
Author(s):  
Long-yue Gao ◽  
Wei-qi Zhou ◽  
Yuan-bo Wang ◽  
Si-qi Wang ◽  
Chong Bai ◽  
...  
Keyword(s):  
Coronary Stent ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Beam Laser ◽  
Stent Surface

An equivalent method of multi-beam laser interference lithography for 2D plasmonic crystals fabrication

2015 ◽  
Vol 17 (8) ◽  
pp. 085001 ◽  
Author(s):  
Chen Liu ◽  
Cheng Zhang ◽  
Hui Wang ◽  
Yikai Chen ◽  
Xinrui Lei ◽  
...  
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Plasmonic Crystals ◽  
Beam Laser ◽  
Equivalent Method

Effects of polarization on four-beam laser interference lithography

2013 ◽  
Vol 102 (8) ◽  
pp. 081903 ◽  
Author(s):  
Dapeng Wang ◽  
Zuobin Wang ◽  
Ziang Zhang ◽  
Yong Yue ◽  
Dayou Li ◽  
...  
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Beam Laser
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