The design and application of large area intensive lens array focal spots measurement system

2014 ◽  
Author(s):  
Bingzhen Chen ◽  
Shun Yao ◽  
Guanghui Yang ◽  
Mingchong Dai ◽  
Zhiyong Wang
Keyword(s):  
Measurement System ◽  
Large Area ◽  
Lens Array ◽  
Design And Application

scholarly journals A Differential Measurement System for Surface Topography Based on a Modular Design

2020 ◽  
Vol 10 (4) ◽  
pp. 1536
Author(s):  
Fang Cheng ◽  
Jingwu Zou ◽  
Hang Su ◽  
Yin Wang ◽  
Qing Yu
Keyword(s):  
Surface Topography ◽  
Measurement System ◽  
Modular Design ◽  
Measurement Range ◽  
High Accuracy ◽  
The Novel ◽  
Large Area ◽  
Differential Measurement ◽  
Motion Error ◽  
Novel Concept

In this paper, a novel design of a surface topography measurement system is proposed, to address the challenge of accurate measurement in a relatively large area. This system was able to achieve nanometer-scale accuracy in a measurement range of 100 mm × 100 mm. The high accuracy in a relatively large area was achieved by implementing two concepts: (1) A static coordinate system was configured to minimize the Abbe errors. (2) A differential measurement configuration was developed by setting up a confocal sensor and a film interferometry module to separate the motion error. In order to accommodate the differential measurement probes from both sides of the central stage and ensure the system rigidity with balanced supports, separate linear guides were introduced in this system. Therefore, the motion Degree of Freedom (DoF) was analyzed in order to address the challenge of an over-constrained mechanism due to multiple kinematic pairs. An optimal configuration and a quick assembly process were proposed accordingly. The experimental results presented in this paper showed that the proposed modular measurement system was able to achieve 10 nm accuracy in measuring the surface roughness and 100 nm accuracy in measuring the step height in the range of 100 mm × 100 mm. In summary, the novel concept of this study is the build of a high-accuracy system with conventional mechanical components.

Design of a large area 2D microscopy image measurement system

2010 ◽  
Author(s):  
Xin Li ◽  
Yurong Chen ◽  
Shenghuai Wang ◽  
Tiebang Xie
Keyword(s):  
Measurement System ◽  
Large Area ◽  
Image Measurement ◽  
Microscopy Image

scholarly journals Design and application of electron energy measurement system based on silicon photodiode

AIP Advances ◽  
2020 ◽  
Vol 10 (1) ◽  
pp. 015146
Author(s):  
Jianghai Geng ◽  
Xinyu Wang ◽  
Fangcheng Lv ◽  
Shengfu Wang ◽  
Ping Wang ◽  
...  
Keyword(s):  
Electron Energy ◽  
Measurement System ◽  
Energy Measurement ◽  
Silicon Photodiode ◽  
Design And Application

Large-Area Sub-Wavelength Optical Patterning via Long-Range Ordered Polymer Lens Array

2016 ◽  
Vol 8 (25) ◽  
pp. 16368-16378 ◽  
Author(s):  
Jin Wu ◽  
Chihao Liow ◽  
Kai Tao ◽  
Yuanyuan Guo ◽  
Xiaotian Wang ◽  
...  
Keyword(s):  
Long Range ◽  
Large Area ◽  
Lens Array ◽  
Optical Patterning ◽  
Sub Wavelength

Mixed Measurement Form System Base on State Estimation on SCADA/PMU

2015 ◽  
Vol 742 ◽  
pp. 172-175
Author(s):  
Yi Bing Xie ◽  
Yu Jie Ge ◽  
Ting Ting Sun
Keyword(s):  
Information Technology ◽  
State Estimation ◽  
Real Time ◽  
Measurement System ◽  
Area Measurement ◽  
Large Area ◽  
Technology Platform ◽  
Wide Area Measurement System ◽  
Advanced Information Technology ◽  
Control Direction

The state estimation based on the synchronous phasor measuring unit (PMU) is the wide-area measurement system (WAMS) of important technical support, It is great to real-time monitoring of large area power grid control direction and provides advanced information technology platform. it provides advanced information technology platform for real-time monitoring of large area power grid and control direction, but the current wide-area measurement system less point, difficult to direct the system state estimation. This paper proposes a method based on PMU and SCADA mixed measurement state estimation. The simulation results show that this method has a higher convergence speed, And from the topology of the network structure of the restrictions.

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