Surface profile measurement of a diffraction grating by a laser beam scanning interferometer using sinusoidal phase modulation

Mapping Intimacies ◽

10.1117/12.2025328 ◽

2013 ◽

Author(s):

Osami Sasaki ◽

Takuya Kubota ◽

Samuel Choi ◽

Takamasa Suzuki

Keyword(s):

Laser Beam ◽

Diffraction Grating ◽

Phase Modulation ◽

Surface Profile ◽

Profile Measurement ◽

Beam Scanning ◽

Scanning Interferometer ◽

Laser Beam Scanning ◽

Surface Profile Measurement

Download Full-text

Pattern and Profile Measurement and Testing by Laser Beam Scanning

The Review of Laser Engineering ◽

10.2184/lsj.13.69 ◽

1985 ◽

Vol 13 (1) ◽

pp. 69-77

Author(s):

Tadashi MOROKUMA

Keyword(s):

Laser Beam ◽

Profile Measurement ◽

Beam Scanning ◽

Measurement And Testing ◽

Laser Beam Scanning

Download Full-text

A Non-Contact Method For Surface Profile Measurement And Angular Deflection Monitoring Using A Scanning Laser Beam

10.1117/12.938210 ◽

1978 ◽

Cited By ~ 2

Author(s):

Francisco M. Smolka ◽

Thomas P. Caudell

Keyword(s):

Laser Beam ◽

Surface Profile ◽

Scanning Laser ◽

Profile Measurement ◽

Contact Method ◽

Angular Deflection ◽

Surface Profile Measurement

Download Full-text

Advanced signal processing in a white-light scanning interferometer for exact surface profile measurement

Optical Metrology and Inspection for Industrial Applications V ◽

10.1117/12.2502790 ◽

2018 ◽

Author(s):

Songjie Luo ◽

Osami Sasaki ◽

Samuel Choi ◽

Takamasa Suzuki ◽

Jixiong Pu

Keyword(s):

Signal Processing ◽

White Light ◽

Surface Profile ◽

Profile Measurement ◽

Scanning Interferometer ◽

Surface Profile Measurement

Download Full-text

Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

Applied Optics ◽

10.1364/ao.43.004157 ◽

2004 ◽

Vol 43 (21) ◽

pp. 4157 ◽

Cited By ~ 13

Author(s):

Ryo Shinozaki ◽

Osami Sasaki ◽

Takamasa Suzuki

Keyword(s):

Laser Beam ◽

Surface Profile ◽

Profile Measurement ◽

Scanning Method ◽

One Dimensional ◽

Angular Deflection ◽

Dimensional Surface ◽

Surface Profile Measurement

Download Full-text

Exact surface profile measurement without subtracting dispersion phase through Fourier transform in a white-light scanning interferometer

Applied Optics ◽

10.1364/ao.57.000894 ◽

2018 ◽

Vol 57 (4) ◽

pp. 894 ◽

Cited By ~ 3

Author(s):

Songjie Luo ◽

Osami Sasaki ◽

Ziyang Chen ◽

Samuel Choi ◽

Jixiong Pu

Keyword(s):

Fourier Transform ◽

White Light ◽

Surface Profile ◽

Profile Measurement ◽

Dispersion Phase ◽

Scanning Interferometer ◽

Surface Profile Measurement

Download Full-text

A New Quantitative Method of Shot Peening Coverage Measurement with Utilization of Laser Beam Surface Profile Measurement

Transactions of Japan Society of Spring Engineers ◽

10.5346/trbane.2009.49 ◽

2009 ◽

pp. 49-52

Author(s):

Ayamitsu AMANO ◽

Yuichi HIRATA ◽

Masami WAKITA

Keyword(s):

Laser Beam ◽

Shot Peening ◽

Quantitative Method ◽

Surface Profile ◽

Profile Measurement ◽

Beam Surface ◽

Coverage Measurement ◽

Surface Profile Measurement

Download Full-text

Two-grating interferometer with sinusoidal phase modulation for surface profile measurement

Optical Engineering ◽

10.1117/1.1883083 ◽

2005 ◽

Vol 44 (4) ◽

pp. 043601 ◽

Cited By ~ 1

Author(s):

Yande Xu

Keyword(s):

Phase Modulation ◽

Surface Profile ◽

Profile Measurement ◽

Grating Interferometer ◽

Surface Profile Measurement

Download Full-text

Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer

10.1117/12.828674 ◽

2009 ◽

Author(s):

Guotian He ◽

Helun Jiang ◽

Rongchang Liao

Keyword(s):

Error Analysis ◽

Real Time ◽

Phase Modulation ◽

Surface Profile ◽

Profile Measurement ◽

Surface Profile Measurement

Download Full-text

Thickness and Surface Profile Measurement by a Sinusoidal Wavelength-Scanning Interferometer

Optical Review ◽

10.1007/s10043-005-0319-0 ◽

2005 ◽

Vol 12 (4) ◽

pp. 319-323 ◽

Cited By ~ 2

Author(s):

Hisashi Akiyama ◽

Osami Sasaki ◽

Takamasa Suzuki

Keyword(s):

Surface Profile ◽

Profile Measurement ◽

Wavelength Scanning ◽

Scanning Interferometer ◽

Surface Profile Measurement

Download Full-text

An Algorithm for Discontinuous Surface Profile Measurement using Wavelength Scanning Interferometer

Journal of Control Automation and Systems Engineering ◽

10.5302/j.icros.2003.9.7.507 ◽

2003 ◽

Vol 9 (7) ◽

pp. 507-514

Keyword(s):

Surface Profile ◽

Profile Measurement ◽

Discontinuous Surface ◽

Wavelength Scanning ◽

Scanning Interferometer ◽

Surface Profile Measurement

Download Full-text