Advanced signal processing in a white-light scanning interferometer for exact surface profile measurement

2018 ◽  
Author(s):  
Songjie Luo ◽  
Osami Sasaki ◽  
Samuel Choi ◽  
Takamasa Suzuki ◽  
Jixiong Pu
Keyword(s):  
Signal Processing ◽  
White Light ◽  
Surface Profile ◽  
Profile Measurement ◽  
Scanning Interferometer ◽  
Surface Profile Measurement

Surface profile measurement in white-light scanning interferometry using a three-chip color CCD

2011 ◽  
Vol 50 (15) ◽  
pp. 2246 ◽  
Author(s):  
Suodong Ma ◽  
Chenggen Quan ◽  
Rihong Zhu ◽  
Cho Jui Tay ◽  
Lei Chen
Keyword(s):  
White Light ◽  
Surface Profile ◽  
Chip Color ◽  
Profile Measurement ◽  
Surface Profile Measurement

Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement

2019 ◽  
Vol 58 (13) ◽  
pp. 3548 ◽  
Author(s):  
Songjie Luo ◽  
Takamasa Suzuki ◽  
Osami Sasaki ◽  
Samuel Choi ◽  
Ziyang Chen ◽  
...  
Keyword(s):  
White Light ◽  
Surface Profile ◽  
Profile Measurement ◽  
White Light Interferometer ◽  
Signal Correction ◽  
Surface Profile Measurement
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