Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer

2009 ◽  
Author(s):  
Guotian He ◽  
Helun Jiang ◽  
Rongchang Liao
Keyword(s):  
Error Analysis ◽  
Real Time ◽  
Phase Modulation ◽  
Surface Profile ◽  
Profile Measurement ◽  
Surface Profile Measurement

Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer

Optik ◽  
2009 ◽  
Vol 120 (11) ◽  
pp. 553-557 ◽  
Author(s):  
He Guotian ◽  
Liao Changrong ◽  
Jiang helun ◽  
Yuangang Lu ◽  
Huang Shanglian
Keyword(s):  
Real Time ◽  
Surface Profile ◽  
Profile Measurement ◽  
Feedback Type ◽  
Sinusoidal Phase Modulating ◽  
Surface Profile Measurement
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