Direct electron beam patterning of sub-5nm monolayer graphene interconnects

2013 ◽  
Author(s):  
Zhengqing John Qi ◽  
Julio A. Rodríguez-Manzo ◽  
Sung Ju Hong ◽  
Yung Woo Park ◽  
Eric A. Stach ◽  
...  
Keyword(s):  
Electron Beam ◽  
Monolayer Graphene ◽  
Electron Beam Patterning

Proximity and heating effects during electron-beam patterning of ultraviolet lithography masks

2002 ◽  
Vol 20 (6) ◽  
pp. 3029 ◽  
Author(s):  
B. Lu ◽  
J. R. Wasson ◽  
E. J. Weisbrod ◽  
Z. Masnyj ◽  
P. J. S. Mangat ◽  
...  
Keyword(s):  
Electron Beam ◽  
Ultraviolet Lithography ◽  
Heating Effects ◽  
Electron Beam Patterning

Dendrimer-Scaffold-Based Electron-Beam Patterning of Biomolecules

2006 ◽  
Vol 18 (3) ◽  
pp. 315-319 ◽  
Author(s):  
P. Bhatnagar ◽  
S. S. Mark ◽  
I. Kim ◽  
H. Chen ◽  
B. Schmidt ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Patterning

Controlled and Selective Area Growth of Monolayer Graphene on 4H-SiC Substrate by Electron-Beam-Assisted Rapid Heating

2013 ◽  
Vol 117 (37) ◽  
pp. 19195-19202 ◽  
Author(s):  
P. Dharmaraj ◽  
K. Jeganathan ◽  
V. Gokulakrishnan ◽  
P. Sundara Venkatesh ◽  
R. Parameshwari ◽  
...  
Keyword(s):  
Electron Beam ◽  
Rapid Heating ◽  
Monolayer Graphene ◽  
Selective Area Growth ◽  
Selective Area ◽  
Area Growth

Limitations of proximity-effect correction for electron-beam patterning of photonic crystals

2004 ◽  
Author(s):  
Robert Wuest ◽  
Christoph Hunziker ◽  
Franck Robin ◽  
Patric Strasser ◽  
Daniel Erni ◽  
...  
Keyword(s):  
Electron Beam ◽  
Photonic Crystals ◽  
Proximity Effect ◽  
Electron Beam Patterning ◽  
Proximity Effect Correction

scholarly journals Localized resist heating due to electron-beam patterning during photomask fabrication

2001 ◽  
Author(s):  
Alexander C. Wei ◽  
William A. Beckman ◽  
Roxann L. Engelstad ◽  
John W. Mitchell ◽  
Thanh N. Phung ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Patterning
Sign in / Sign up

Export Citation Format

Share Document