High order field-to-field corrections for imaging and overlay to achieve sub 20-nm lithography requirements

2013 ◽  
Author(s):  
Jan Mulkens ◽  
Michael Kubis ◽  
Paul Hinnen ◽  
Roelof de Graaf ◽  
Hans van der Laan ◽  
...  
Keyword(s):  
High Order ◽  
20 Nm ◽  
High Order Field

Advanced high order field-to-field modeling for wafer edge control

2020 ◽  
Author(s):  
Boris Habets ◽  
Stefan Buhl ◽  
Wan-Soo Kim ◽  
Patrick Lomtscher ◽  
Holger Bald ◽  
...  
Keyword(s):  
High Order ◽  
Field Modeling ◽  
High Order Field ◽  
Wafer Edge

Effect of high-order field corrections in electron scattering by intense laser beams in vacuum

2001 ◽  
Vol 55 (4) ◽  
pp. 492-498
Author(s):  
J. X Wang ◽  
W Scheid ◽  
M Hoelss ◽  
Y. K Ho ◽  
Q Kong
Keyword(s):  
Electron Scattering ◽  
High Order ◽  
Intense Laser ◽  
Laser Beams ◽  
High Order Field

Electron Injection in Laser Plasma Accelerators by High-Order Field Ionization

2010 ◽  
Author(s):  
M. Chen ◽  
E. Esarey ◽  
C. G. R. Geddes ◽  
C. B. Schroeder ◽  
W. P. Leemans ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Electron Injection ◽  
High Order ◽  
Field Ionization ◽  
Plasma Accelerators ◽  
High Order Field

Giant high-order field moments in metal–dielectric composites

1999 ◽  
Vol 266 (1-4) ◽  
pp. 115-122 ◽  
Author(s):  
Andrey K. Sarychev ◽  
Vladimir M. Shalaev
Keyword(s):  
High Order ◽  
High Order Field

Enhanced high-order ultraviolet upconversion luminescence in sub-20 nm β-NaYbF4:0.5% Tm nanoparticles via Fe3+doping

CrystEngComm ◽  
2017 ◽  
Vol 19 (9) ◽  
pp. 1304-1310 ◽  
Author(s):  
Yanting Zhang ◽  
Yingli Shen ◽  
Miao Liu ◽  
Yu Han ◽  
Xiulan Mo ◽  
...  
Keyword(s):  
Upconversion Luminescence ◽  
High Order ◽  
20 Nm
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