Sinusoidal phase-modulating Fizeau interferometer using a self-pumped phase conjugator for surface profile measurements

1994 ◽  
Vol 33 (8) ◽  
pp. 2670 ◽  
Author(s):  
Xiangzhao Wang
Keyword(s):  
Surface Profile ◽  
Fizeau Interferometer ◽  
Sinusoidal Phase Modulating

Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer

Optik ◽  
2009 ◽  
Vol 120 (11) ◽  
pp. 553-557 ◽  
Author(s):  
He Guotian ◽  
Liao Changrong ◽  
Jiang helun ◽  
Yuangang Lu ◽  
Huang Shanglian
Keyword(s):  
Real Time ◽  
Surface Profile ◽  
Profile Measurement ◽  
Feedback Type ◽  
Sinusoidal Phase Modulating ◽  
Surface Profile Measurement

Sinusoidal phase-modulating Fizeau interferometer using phase-conjugate wave

1993 ◽  
Author(s):  
Osami Sasaki ◽  
Xiangzhao Wang ◽  
Yuuichi Takebayashi ◽  
Takamasa Suzuki
Keyword(s):  
Fizeau Interferometer ◽  
Phase Conjugate ◽  
Sinusoidal Phase Modulating

scholarly journals Algorithm for Surfaces Profiles and Thickness Variation Measurement of a Transparent Plate Using a Fizeau Interferometer with Wavelength Tuning

2019 ◽  
Vol 9 (11) ◽  
pp. 2349 ◽  
Author(s):  
Tao Sun ◽  
Weiwei Zheng ◽  
Yingjie Yu ◽  
Ketao Yan ◽  
Anand Asundi ◽  
...  
Keyword(s):  
Rear Surface ◽  
Surface Profile ◽  
Measuring Method ◽  
Processing Technique ◽  
Repeated Measurements ◽  
Thickness Variation ◽  
Fizeau Interferometer ◽  
Transparent Plate ◽  
Surface Profiles ◽  
Step Algorithm

An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for characterization of transparent plates having approximately equal reflections from both sides. The algorithm utilizes weighted multi-step phase shifting that enables one not only separately to extract the front and rear surface profiles together with the thickness variation of the tested plate but also to suppress the coupling errors between the higher harmonics and phase-shift deviation. The proposed measuring method was studied on a wavelength tunable Fizeau interferometer. The tested sample had an optical thickness and surface profile deviations equal to 0.51 µm, 1.38 µm and 0.89 µm, respectively. According to the results obtained using 10 repeated measurements, the root mean square (RMS) errors for determining both surface profiles did not exceed 1.5 nm. Experimental results show that the setup and presented 36-step algorithm are suitable for the measurement of a transparent plate of arbitrary thickness.

Sinusoidal phase modulating Fizeau interferometer

1990 ◽  
Vol 29 (4) ◽  
pp. 512 ◽  
Author(s):  
Osami Sasaki ◽  
Toshiaki Okamura ◽  
Takanori Nakamura
Keyword(s):  
Fizeau Interferometer ◽  
Sinusoidal Phase Modulating
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