Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement

2005 ◽  
Vol 44 (12) ◽  
pp. 125602 ◽  
Author(s):  
Xuefeng Zhao
Keyword(s):  
Laser Diode ◽  
Machine Surface ◽  
Surface Profile ◽  
Profile Measurement ◽  
Sinusoidal Phase Modulating ◽  
Surface Profile Measurement

Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer

Optik ◽  
2009 ◽  
Vol 120 (11) ◽  
pp. 553-557 ◽  
Author(s):  
He Guotian ◽  
Liao Changrong ◽  
Jiang helun ◽  
Yuangang Lu ◽  
Huang Shanglian
Keyword(s):  
Real Time ◽  
Surface Profile ◽  
Profile Measurement ◽  
Feedback Type ◽  
Sinusoidal Phase Modulating ◽  
Surface Profile Measurement

On-Machine Optical Surface Profile Measuring System for Nano-Machining

2011 ◽  
Vol 5 (3) ◽  
pp. 369-376 ◽  
Author(s):  
Hiroshi Sawano ◽  
◽  
Motohiro Takahashi ◽  
Hayato Yoshioka ◽  
Hidenori Shinno ◽  
...  
Keyword(s):  
Error Detection ◽  
Machine Surface ◽  
Detection Method ◽  
Surface Profile ◽  
Optical Probe ◽  
Measuring System ◽  
Profile Measurement ◽  
Optical Surface ◽  
Increasing Demand ◽  
Surface Profile Measurement

There has been an increasing demand for machining of precision parts recently. In order to meet such requirements, nano-machining systems with on-machine surface profile measuring function are required. This paper presents a newly developed on-machine shape measuring system with an optical probe. In this system, an astigmatic focus error detection method is applied to the optical probe. In addition, the influence of the uneven reflection from the surface can be reduced by using two quadrant photodiodes. The results of surface profile measurement confirm that the system developed provides a resolution of 1 nm scale and a repeatability of approximately 50 nm.

Phase locked laser diode interferometry for surface profile measurement

1989 ◽  
Vol 28 (20) ◽  
pp. 4407 ◽  
Author(s):  
Takamasa Suzuki ◽  
Osami Sasaki ◽  
Takeo Maruyama
Keyword(s):  
Laser Diode ◽  
Surface Profile ◽  
Profile Measurement ◽  
Surface Profile Measurement
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