Submicron deep-UV imaging with a catadioptric step-and-repeat exposure system
Analysis of Horizontal-Vertical Patterning Asymmetry in a Linearly Polarized Deep UV Exposure System
1998 ◽
Vol 37
(Part 1, No. 1)
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pp. 364-368
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2004 ◽
Vol 107
(1027)
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pp. 438-440
2010 ◽
Vol 241
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pp. 012079
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