X-ray optics design approach for an SXLS lithography beamline

1992 ◽  
Author(s):  
Argyrios Doumas ◽  
Stephen Kovacs
Keyword(s):  
Design Approach ◽  
Ray Optics ◽  
X Ray ◽  
Optics Design

scholarly journals A finite element approach to x-ray optics design

2017 ◽  
Author(s):  
A. P. Honkanen ◽  
C. Ferrero ◽  
J. P. Guigay ◽  
V. Mocella
Keyword(s):  
Finite Element ◽  
Ray Optics ◽  
Finite Element Approach ◽  
X Ray ◽  
Element Approach ◽  
Optics Design

scholarly journals NuSTAR hard x-ray optics design and performance

2009 ◽  
Author(s):  
Jason E. Koglin ◽  
HongJun An ◽  
Kenneth L. Blaedel ◽  
Nicolai F. Brejnholt ◽  
Finn E. Christensen ◽  
...  
Keyword(s):  
Ray Optics ◽  
X Ray ◽  
And Performance ◽  
Optics Design

X-ray microprobe for materials science

1994 ◽  
Vol 52 ◽  
pp. 56-57
Author(s):  
G.E. Ice
Keyword(s):  
Crystallographic Orientation ◽  
Local Structure ◽  
Materials Science ◽  
Chemical Information ◽  
X Ray Diffraction ◽  
Ray Optics ◽  
X Ray ◽  
Novel Materials ◽  
New Information ◽  
Elemental Sensitivity

The increasing availability of synchrotron x-ray sources has stimulated the development of advanced hard x-ray (E≥5 keV) microprobes. With new x-ray optics these microprobes can achieve micron and submicron spatial resolutions. The inherent elemental and crystallographic sensitivity of an x-ray microprobe and its inherently nondestructive and penetrating nature will have important applications to materials science. For example, x-ray fluorescent microanalysis of materials can reveal elemental distributions with greater sensitivity than alternative nondestructive probes. In materials, segregation and nonuniform distributions are the rule rather than the exception. Common interfaces to whichsegregation occurs are surfaces, grain and precipitate boundaries, dislocations, and surfaces formed by defects such as vacancy and interstitial configurations. In addition to chemical information, an x-ray diffraction microprobe can reveal the local structure of a material by detecting its phase, crystallographic orientation and strain.Demonstration experiments have already exploited the penetrating nature of an x-ray microprobe and its inherent elemental sensitivity to provide new information about elemental distributions in novel materials.

Aperiodic multilayer structures in soft X-ray optics

2015 ◽  
Vol 185 (11) ◽  
pp. 1203-1214 ◽  
Author(s):  
Aleksandr S. Pirozhkov ◽  
Evgenii N. Ragozin
Keyword(s):  
Multilayer Structures ◽  
Ray Optics ◽  
X Ray

Diffraction limited X-ray optics: technology, metrology, applications

2019 ◽  
Vol 190 (01) ◽  
pp. 74-91
Author(s):  
Nikolai I. Chkhalo ◽  
Ilya V. Malyshev ◽  
Alexey E. Pestov ◽  
Vladimir N. Polkovnikov ◽  
Nikolai N. Salashchenko ◽  
...  
Keyword(s):  
Ray Optics ◽  
X Ray
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