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pp. 031102 ◽  
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Andrew R. Neureuther
Keyword(s):  
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Phase Shifting ◽  
High Numerical Aperture ◽  
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Author(s):  
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Eiji Kurose ◽  
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Toshiro Itani
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Phase Shifting ◽  
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scholarly journals Focal Surface Detection of High Numerical Aperture Objective Lens Based on Differential Astigmatic Method

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Vol 13 (4) ◽  
pp. 1-8
Author(s):  
Jia-Lin Du ◽  
Wei Yan ◽  
Li-Wei Liu ◽  
Fan-Xing Li ◽  
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Surface Detection ◽  
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Author(s):  
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Keyword(s):  
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High Numerical Aperture ◽  
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