scholarly journals Ultrahigh aspect ratio etching of silicon in SF6-O2 plasma: The clear-oxidize-remove-etch (CORE) sequence and chromium mask

2020 ◽  
Vol 38 (5) ◽  
pp. 053002
Author(s):  
Vy Thi Hoang Nguyen ◽  
Evgeniy Shkondin ◽  
Flemming Jensen ◽  
Jörg Hübner ◽  
Pele Leussink ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Core Sequence ◽  
O2 Plasma

Effect of substrate temperature on sidewall erosion in high-aspect-ratio Si hole etching employing HBr/SF6/O2 plasma

2018 ◽  
Vol 57 (9) ◽  
pp. 098004
Author(s):  
Itsuko Sakai ◽  
Katsunori Yahashi ◽  
Satoshi Shimonishi ◽  
Makoto Sekine ◽  
Masaru Hori
Keyword(s):  
Aspect Ratio ◽  
Substrate Temperature ◽  
High Aspect Ratio ◽  
O2 Plasma

scholarly journals On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand

2020 ◽  
Vol 38 (4) ◽  
pp. 043004
Author(s):  
Vy Thi Hoang Nguyen ◽  
Flemming Jensen ◽  
Jörg Hübner ◽  
Pele Leussink ◽  
Henri Jansen
Keyword(s):  
Black Silicon ◽  
On Demand ◽  
Core Sequence ◽  
O2 Plasma

Cyclic C4F8 and O2 plasma etching of TiO2 for high-aspect-ratio three-dimensional devices

2021 ◽  
Vol 60 (3) ◽  
pp. 036001
Author(s):  
Tsubasa Imamura ◽  
Itsuko Sakai ◽  
Hisataka Hayashi ◽  
Makoto Sekine ◽  
Masaru Hori
Keyword(s):  
Aspect Ratio ◽  
Plasma Etching ◽  
High Aspect Ratio ◽  
Three Dimensional ◽  
O2 Plasma

scholarly journals Comparison between Bosch and STiGer Processes for Deep Silicon Etching

Micromachines ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 1143
Author(s):  
Thomas Tillocher ◽  
Jack Nos ◽  
Gaëlle Antoun ◽  
Philippe Lefaucheux ◽  
Mohamed Boufnichel ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Cryogenic Temperature ◽  
Plasma Chemistry ◽  
Silicon Etching ◽  
Bosch Process ◽  
Isotropic Etching ◽  
Cryogenic Process ◽  
Sidewall Passivation ◽  
Free Plasma ◽  
O2 Plasma

The cryogenic process is well known to etch high aspect ratio features in silicon with smooth sidewalls. A time-multiplexed cryogenic process, called STiGer, was developed in 2006 and patented. Like the Bosch process, it consists in repeating cycles composed of an isotropic etching step followed by a passivation step. If the etching step is similar for both processes, the passivation step is a SiF4/O2 plasma that efficiently deposits a SiOxFy layer on the sidewalls only if the substrate is cooled at cryogenic temperature. In this paper, it is shown that the STiGer process can achieve profiles and performances equivalent to the Bosch process. However, since sidewall passivation is achieved with polymer free plasma chemistry, less frequent chamber cleaning is necessary, which contributes to increase the throughput.

Modification of MnS inclusion by tellurium in 38MnVS6 micro-alloyed steel

2020 ◽  
Vol 117 (6) ◽  
pp. 615
Author(s):  
Ping Shen ◽  
Lei Zhou ◽  
Qiankun Yang ◽  
Zhiqi Zeng ◽  
Kenan Ai ◽  
...  
Keyword(s):  
Fatigue Life ◽  
Aspect Ratio ◽  
Strong Influence ◽  
Experimental Results ◽  
Alloyed Steel ◽  
Equivalent Diameter ◽  
Small Aspect Ratio ◽  
Steel Quality ◽  
Eds Analysis ◽  
Micro Alloyed Steel

In 38MnVS6 steel, the morphology of sulfide inclusion has a strong influence on the fatigue life and machinability of the steel. In most cases, the MnS inclusions show strip morphology after rolling, which significantly affects the steel quality. Usually, the MnS inclusion with a spherical morphology is the best morphology for the steel quality. In the present work, tellurium was applied to 38MnVS6 micro-alloyed steel to control the MnS inclusion. Trace tellurium was added into 38MnVS6 steel and the effect of Te on the morphology, composition, size and distribution of MnS inclusions were investigated. Experimental results show that with the increase of Te content, the equivalent diameter and the aspect ratio of inclusion decrease strikingly, and the number of inclusions with small aspect ratio increases. The inclusions are dissociated and spherized. The SEM-EDS analysis indicates that the trace Te mainly dissolves in MnS inclusion. Once the MnS is saturated with Te, MnTe starts to generate and wraps MnS. The critical Te/S value for the formation of MnTe in the 38MnV6 steel is determined to be approximately 0.075. With the increase of Te/S ratio, the aspect ratio of MnS inclusion decreases and gradually reaches a constant level. The Te/S value in the 38MnVS6 steel corresponding to the change of aspect ratio from decreasing to constant ranges from 0.096 to 0.255. This is most likely to be caused by the saturation of Te in the MnS inclusion. After adding Te in the steel, rod-like MnS inclusion is modified to small inclusion and the smaller the MnS inclusion, the lower the aspect ratio.

PENINGKATAN KEMAMPUAN GURU BAHASA INDONESIA DALAM MENYUSUN RENCANA PROGRAM PEMBELAJARAN (RPP) SDN 015 PAGARAN TAPAH DARUSSALAM MELALUI METODE PEMBERIAN TUGAS

2017 ◽  
Vol 5 (3) ◽  
pp. 713
Author(s):  
Mukhlis '
Keyword(s):  
Aspect Ratio ◽  
Duty Cycle ◽  
Lesson Plans ◽  
Learning Program ◽  
School Subjects ◽  
Bahasa Indonesia

Based on the observation of some teachers found the symptoms as follows: the lack of abilityof Indonesian teachers in designing learning program (RPP), the learning device is only usedas a supplement and not to the needs of teaching, most teachers again if asked the lessonanswered not have or has not been made. The purpose of this research is to improve theability of Indonesian teachers in designing learning program (RPP) at SDN 015 PagaranTapah Darussalam through the method of administration tasks. This type of research is actionresearch school. Subjects in this study were teachers Indonesian as many as 12 people. Basedon the analysis and discussion can be concluded that the method of administration tasks canimprove the ability of Indonesian teachers in making learning device in SDN 015 PagaranTapah Darussalam through the method of administration tasks. Under these conditions, thelevel of acceptance of teachers increased. The aspect ratio capability Indonesian teachers inpreparing lesson plans through the provision of duty cycle I and II of the increase from 56%and the second cycle to 79%.

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