On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand
2020 ◽
Vol 38
(4)
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pp. 043004
2003 ◽
Vol 50
(2)
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pp. 185-197
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2020 ◽
Vol 64
(1-4)
◽
pp. 1261-1268
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