Effect of radio frequency bias power on SiO[sub 2] feature etching in inductively coupled fluorocarbon plasmas

2000 ◽  
Vol 18 (2) ◽  
pp. 848 ◽  
Author(s):  
M. Schaepkens ◽  
G. S. Oehrlein ◽  
J. M. Cook
Keyword(s):  
Radio Frequency ◽  
Bias Power ◽  
Inductively Coupled ◽  
Fluorocarbon Plasmas

Hybrid simulation of radio frequency biased inductively coupled Cl2 plasmas

2021 ◽  
Vol 28 (5) ◽  
pp. 053512
Author(s):  
Lei Tong ◽  
Yu-Ru Zhang ◽  
Jia-Wei Huang ◽  
Ming-Liang Zhao ◽  
De-Qi Wen ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Hybrid Simulation ◽  
Inductively Coupled

Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition

Carbon ◽  
2004 ◽  
Vol 42 (14) ◽  
pp. 2867-2872 ◽  
Author(s):  
Jianjun Wang ◽  
Mingyao Zhu ◽  
Ron A. Outlaw ◽  
Xin Zhao ◽  
Dennis M. Manos ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Radio Frequency ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Radio Frequency Plasma ◽  
Carbon Nanosheets ◽  
Inductively Coupled ◽  
Frequency Plasma

Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

1997 ◽  
Vol 68 (6) ◽  
pp. 2381-2383 ◽  
Author(s):  
K. Eng ◽  
K. Strohmaier ◽  
R. Palmer ◽  
B. Stoner ◽  
S. Washburn
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled

Development of Inductively Coupled Wireless Radio Frequency Coil for Magnetic Resonance Scanners

2007 ◽  
Author(s):  
Tomohiro Sahara ◽  
Shigehiro Hashimoto ◽  
Hiroshi Tsutsui ◽  
Shuichi Mochizuki ◽  
Kenichi Yamasaki ◽  
...  
Keyword(s):  
Magnetic Resonance ◽  
Radio Frequency ◽  
Radio Frequency Coil ◽  
Inductively Coupled
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