A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power

2011 ◽  
Vol 109 (7) ◽  
pp. 073311 ◽  
Author(s):  
D. C. Kwon ◽  
W. S. Chang ◽  
M. Park ◽  
D. H. You ◽  
M. Y. Song ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Global Model ◽  
Plasma Discharges ◽  
Bias Power ◽  
Inductively Coupled ◽  
Self Consistent

On the applicability of self-consistent global model for the characterization of Cl2/Ar inductively coupled plasma

2007 ◽  
Vol 84 (1) ◽  
pp. 136-143 ◽  
Author(s):  
A.M. Efremov ◽  
Gwan-Ha Kim ◽  
Jong-Gyu Kim ◽  
A.V. Bogomolov ◽  
Chang-Il Kim
Keyword(s):  
Inductively Coupled Plasma ◽  
Global Model ◽  
Inductively Coupled ◽  
Self Consistent

Global model analysis of Ar inductively coupled plasma driven by a 150 kHz-band high-power pulse burst

2019 ◽  
Vol 58 (SA) ◽  
pp. SAAB06
Author(s):  
Yuma Saito ◽  
Kodai Shibata ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
...  
Keyword(s):  
High Power ◽  
Inductively Coupled Plasma ◽  
Model Analysis ◽  
Global Model ◽  
Pulse Burst ◽  
Inductively Coupled ◽  
Power Pulse ◽  
High Power Pulse

Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 025001 ◽  
Author(s):  
L Lallement ◽  
A Rhallabi ◽  
C Cardinaud ◽  
M C Peignon-Fernandez ◽  
L L Alves
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Global Model ◽  
Inductively Coupled

Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

1997 ◽  
Vol 68 (6) ◽  
pp. 2381-2383 ◽  
Author(s):  
K. Eng ◽  
K. Strohmaier ◽  
R. Palmer ◽  
B. Stoner ◽  
S. Washburn
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled
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