Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

K. Eng; K. Strohmaier; R. Palmer; B. Stoner; S. Washburn

doi:10.1063/1.1148121

Comparison of external and internal planar radio frequency antennae for inductively coupled plasma

Review of Scientific Instruments ◽

10.1063/1.1148121 ◽

1997 ◽

Vol 68 (6) ◽

pp. 2381-2383 ◽

Cited By ~ 6

Author(s):

K. Eng ◽

K. Strohmaier ◽

R. Palmer ◽

B. Stoner ◽

S. Washburn

Keyword(s):

Radio Frequency ◽

Inductively Coupled Plasma ◽

Inductively Coupled

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Electron dynamics and frequency coupling in a radio-frequency capacitively biased planar coil inductively coupled plasma system

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/4/044007 ◽

2015 ◽

Vol 24 (4) ◽

pp. 044007 ◽

Cited By ~ 8

Author(s):

M Zaka-ul-Islam ◽

D O’Connell ◽

W G Graham ◽

T Gans

Keyword(s):

Radio Frequency ◽

Inductively Coupled Plasma ◽

Electron Dynamics ◽

Plasma System ◽

Inductively Coupled ◽

Planar Coil ◽

Frequency Coupling

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Experimental studies on the properties of the discharge modes in a cylindrical radio frequency inductively coupled plasma

Acta Physica Sinica ◽

10.7498/aps.57.4304 ◽

2008 ◽

Vol 57 (7) ◽

pp. 4304

Author(s):

Ding Zhen-Feng ◽

Yuan Guo-Yu ◽

Gao Wei ◽

Sun Jing-Chao

Keyword(s):

Radio Frequency ◽

Inductively Coupled Plasma ◽

Experimental Studies ◽

Inductively Coupled

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Numerical simulation of aerosol droplets desolvation in a radio frequency inductively coupled plasma

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2003.09.003 ◽

2003 ◽

Vol 58 (11) ◽

pp. 1959-1977 ◽

Cited By ~ 21

Author(s):

Yanguang Shan ◽

J. Mostaghimi

Keyword(s):

Numerical Simulation ◽

Radio Frequency ◽

Inductively Coupled Plasma ◽

Inductively Coupled

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CVD of hard DLC films in a radio frequency inductively coupled plasma source

Thin Solid Films ◽

10.1016/s0040-6090(01)00945-2 ◽

2001 ◽

Vol 390 (1-2) ◽

pp. 98-103 ◽

Cited By ~ 16

Author(s):

S.J Yu ◽

Z.F Ding ◽

J Xu ◽

J.L Zhang ◽

T.C Ma

Keyword(s):

Radio Frequency ◽

Inductively Coupled Plasma ◽

Plasma Source ◽

Inductively Coupled

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Radio Frequency Planar Inductively Coupled Plasma: Fundamentals and Applications

Plasma Science and Technology for Emerging Economies ◽

10.1007/978-981-10-4217-1_10 ◽

2017 ◽

pp. 527-591

Author(s):

Kanesh Kumar Jayapalan ◽

Oi Hoong Chin ◽

Chiow San Wong

Keyword(s):

Radio Frequency ◽

Inductively Coupled Plasma ◽

Inductively Coupled

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Enhanced Radio Frequency Field Penetration in an Inductively Coupled Plasma

Physical Review Letters ◽

10.1103/physrevlett.77.1286 ◽

1996 ◽

Vol 77 (7) ◽

pp. 1286-1289 ◽

Cited By ~ 35

Author(s):

M. Tuszewski

Keyword(s):

Radio Frequency ◽

Inductively Coupled Plasma ◽

Radio Frequency Field ◽

Inductively Coupled ◽

Frequency Field ◽

Field Penetration

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The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.1286804 ◽

2000 ◽

Vol 7 (9) ◽

pp. 3584-3587 ◽

Cited By ~ 10

Author(s):

ChinWook Chung ◽

Sang-Hun Seo ◽

Hong-Young Chang

Keyword(s):

Magnetic Field ◽

Radio Frequency ◽

Inductively Coupled Plasma ◽

Field Effect ◽

Magnetic Field Effect ◽

Low Frequency ◽

Electron Heating ◽

Inductively Coupled ◽

Frequency Magnetic Field

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Kinetic modeling of the charging of nonconducting walls in a low pressure radio frequency inductively coupled plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580986 ◽

1998 ◽

Vol 16 (1) ◽

pp. 300-305 ◽

Cited By ~ 9

Author(s):

U. Kortshagen

Keyword(s):

Radio Frequency ◽

Kinetic Modeling ◽

Inductively Coupled Plasma ◽

Low Pressure ◽

Inductively Coupled

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Transient response of the radio frequency inductively coupled plasma to a sudden change in power

Journal of Applied Physics ◽

10.1063/1.366914 ◽

1998 ◽

Vol 83 (4) ◽

pp. 1898-1908 ◽

Cited By ~ 34

Author(s):

J. Mostaghimi ◽

K. C. Paul ◽

T. Sakuta

Keyword(s):

Radio Frequency ◽

Transient Response ◽

Inductively Coupled Plasma ◽

Sudden Change ◽

Inductively Coupled

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Estimation Using an Enhancement Factor on Non Local Thermodynamic Equilibrium Behavior of High-lying Energy Levels of Neutral Atom in Argon Radio-Frequency Inductively-Coupled Plasma

Analytical Sciences ◽

10.2116/analsci.32.535 ◽

2016 ◽

Vol 32 (5) ◽

pp. 535-541 ◽

Cited By ~ 2

Author(s):

Kazuaki WAGATSUMA ◽

Kozue SATOH

Keyword(s):

Radio Frequency ◽

Thermodynamic Equilibrium ◽

Inductively Coupled Plasma ◽

Enhancement Factor ◽

Neutral Atom ◽

Local Thermodynamic Equilibrium ◽

Energy Levels ◽

Equilibrium Behavior ◽

Inductively Coupled ◽

Non Local

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