Development of self-aligned contact technology for 0.18 μm static random access memory devices
1999 ◽
Vol 17
(5)
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pp. 2373
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Keyword(s):
2013 ◽
Vol 28
(2)
◽
pp. 025010
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Keyword(s):
Keyword(s):
2020 ◽
Vol 12
(2)
◽
pp. 02008-1-02008-4
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