Imaging properties of the extreme ultraviolet mask
1998 ◽
Vol 16
(6)
◽
pp. 3444
◽
2009 ◽
Vol 27
(6)
◽
pp. 2922
◽
Improved imaging properties of thin attenuated phase shift masks for extreme ultraviolet lithography
2013 ◽
Vol 31
(2)
◽
pp. 021606
◽
2018 ◽
Vol 189
(03)
◽
pp. 323-334
◽
Keyword(s):
Keyword(s):
1998 ◽
Vol 64
(7)
◽
pp. 1004-1007
Keyword(s):