Imaging properties of an extreme ultraviolet microscope objective with reduced Fresnel number

2017 ◽  
Vol 405 ◽  
pp. 312-317 ◽  
Author(s):  
Mitsunori Toyoda ◽  
Kota Kuramitsu ◽  
Mihiro Yanagihara
Keyword(s):  
Extreme Ultraviolet ◽  
Fresnel Number ◽  
Microscope Objective ◽  
Imaging Properties

Resolving Crystallites in Zirconium Oxide Films

1969 ◽  
Vol 27 ◽  
pp. 140-141
Author(s):  
R.A. Ploc
Keyword(s):  
Electron Microscope ◽  
Inelastic Scattering ◽  
Zirconium Oxide ◽  
Oxide Films ◽  
Optic Axis ◽  
Objective Lens ◽  
Microscope Objective ◽  
Linear Optic ◽  
A Current ◽  
Microscope Objective Lens

The optic axis of an electron microscope objective lens is usually assumed to be straight and co-linear with the mechanical center. No reason exists to assume such perfection and, indeed, simple reasoning suggests that it is a complicated curve. A current centered objective lens with a non-linear optic axis when used in conjunction with other lenses, leads to serious image errors if the nature of the specimen is such as to produce intense inelastic scattering.

THE EFFECTS OF MANUFACTURING INACCURACIES ON THE IMAGING PROPERTIES OF ZONE PLATES

1984 ◽  
Vol 45 (C2) ◽  
pp. C2-93-C2-96
Author(s):  
M. J. Simpson ◽  
M. T. Browne ◽  
R. E. Burge ◽  
P. Charalambous ◽  
P. J. Duke ◽  
...  
Keyword(s):  
Zone Plates ◽  
Imaging Properties

Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Mask Inspection ◽  
Extreme Ultraviolet Radiation
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