Reduction of line edge roughness in the top surface imaging process

1998 ◽  
Vol 16 (6) ◽  
pp. 3739 ◽  
Author(s):  
Shigeyasu Mori
Keyword(s):  
Surface Imaging ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Top Surface Imaging

Using alicyclic polymers in top surface imaging systems to reduce line-edge roughness

2000 ◽  
Author(s):  
Mark H. Somervell ◽  
David S. Fryer ◽  
Brian Osborn ◽  
Kyle Patterson ◽  
Sungseo Cho ◽  
...  
Keyword(s):  
Imaging Systems ◽  
Surface Imaging ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Top Surface Imaging

Electrical property study of line-edge roughness in top surface imaging process by silylation

1999 ◽  
Author(s):  
Myoung-Soo Kim ◽  
Hyoung-Gi Kim ◽  
Seung Ho Pyi ◽  
Hyeong-Soo Kim ◽  
Ki-Ho Baik ◽  
...  
Keyword(s):  
Electrical Property ◽  
Surface Imaging ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Top Surface Imaging

Study of the fundamental contributions to line edge roughness in a 193 nm, top surface imaging system

2000 ◽  
Vol 18 (5) ◽  
pp. 2551 ◽  
Author(s):  
Mark H. Somervell ◽  
David S. Fryer ◽  
Brian Osborn ◽  
Kyle Patterson ◽  
Jeffrey Byers ◽  
...  
Keyword(s):  
Imaging System ◽  
Surface Imaging ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Top Surface Imaging ◽  
193 Nm

Resist surface investigations for reduction of Line-Edge-Roughness in Top Surface Imaging technology

1999 ◽  
Vol 46 (1-4) ◽  
pp. 339-343 ◽  
Author(s):  
T. Sugihara ◽  
F. Van Roey ◽  
A.M. Goethals ◽  
K. Ronse ◽  
L. Van den hove
Keyword(s):  
Surface Imaging ◽  
Line Edge Roughness ◽  
Imaging Technology ◽  
Edge Roughness ◽  
Top Surface Imaging

Characterization of Line-Edge Roughness in Cu/Low-kInterconnect Pattern

2008 ◽  
Vol 47 (4) ◽  
pp. 2501-2505 ◽  
Author(s):  
Atsuko Yamaguchi ◽  
Daisuke Ryuzaki ◽  
Ken-ichi Takeda ◽  
Jiro Yamamoto ◽  
Hiroki Kawada ◽  
...  
Keyword(s):  
Line Edge Roughness ◽  
Edge Roughness
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