Fabrication of in situ Ohmic contacts patterned in three dimensions using a focused ion beam during molecular beam epitaxial growth

P. J. A. Sazio

doi:10.1116/1.589641

Fabrication of in situ Ohmic contacts patterned in three dimensions using a focused ion beam during molecular beam epitaxial growth

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589641 ◽

1997 ◽

Vol 15 (6) ◽

pp. 2337 ◽

Cited By ~ 5

Author(s):

P. J. A. Sazio

Keyword(s):

Epitaxial Growth ◽

Ohmic Contacts ◽

Molecular Beam ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensions ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

Selective area two-dimensional electron gas structures and in situ ohmic contacts patterned by focused ion beam doping during molecular beam epitaxial growth

Journal of Crystal Growth ◽

10.1016/0022-0248(93)90722-9 ◽

1993 ◽

Vol 127 (1-4) ◽

pp. 732-736 ◽

Cited By ~ 10

Author(s):

J.H. Thompson ◽

G.A.C. Jones ◽

D.A. Ritchie ◽

E.H. Linfield ◽

M. Houlton ◽

...

Keyword(s):

Ohmic Contacts ◽

Molecular Beam ◽

Focused Ion Beam ◽

Ion Beam ◽

Dimensional Electron ◽

Molecular Beam Epitaxial ◽

Selective Area ◽

Dimensional Electron Gas ◽

Molecular Beam Epitaxial Growth

Download Full-text

Independently contacted electron–hole gas heterostructures fabricated with focused ion beam doping during molecular beam epitaxial growth

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590986 ◽

1999 ◽

Vol 17 (6) ◽

pp. 3226 ◽

Cited By ~ 10

Author(s):

S. Vijendran ◽

P. J. A. Sazio ◽

H. E. Beere ◽

G. A. C. Jones ◽

D. A. Ritchie ◽

...

Keyword(s):

Epitaxial Growth ◽

Molecular Beam ◽

Focused Ion Beam ◽

Ion Beam ◽

Electron Hole ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

Focused ion beam assisted chemically etched mesas on GaAs(001) and the nature of subsequent molecular beam epitaxial growth

Journal of Applied Physics ◽

10.1063/1.365785 ◽

1997 ◽

Vol 82 (2) ◽

pp. 859-864 ◽

Cited By ~ 17

Author(s):

A. Kalburge ◽

A. Konkar ◽

T. R. Ramachandran ◽

P. Chen ◽

A. Madhukar

Keyword(s):

Epitaxial Growth ◽

Molecular Beam ◽

Focused Ion Beam ◽

Ion Beam ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

Low-Energy Focused Ion Beam Doping during Molecular Beam Epitaxial Growth for the Fabrication of Three-Dimensional Devices: The Effect of Dopant Surface Segregation

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.4477 ◽

1995 ◽

Vol 34 (Part 1, No. 8B) ◽

pp. 4477-4480 ◽

Cited By ~ 2

Author(s):

James H. Thompson ◽

Pier J. Sazio ◽

Harvey E.Beere ◽

Geraint A. C. Jones ◽

David A. Ritchie ◽

...

Keyword(s):

Epitaxial Growth ◽

Molecular Beam ◽

Surface Segregation ◽

Focused Ion Beam ◽

Ion Beam ◽

Three Dimensional ◽

Low Energy ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

In situ molecular beam epitaxial growth of SiN films using a source port compatible electron-gun for silicon evaporation

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2870224 ◽

2008 ◽

Vol 26 (3) ◽

pp. 1074 ◽

Cited By ~ 1

Author(s):

W. E. Hoke ◽

T. D. Kennedy ◽

A. Torabi ◽

K. Y. Vandermeulen ◽

J. J. Mosca

Keyword(s):

Epitaxial Growth ◽

Molecular Beam ◽

Electron Gun ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

Use of very low energy in situ focused ion beams for three-dimensional dopant patterning during molecular beam epitaxial growth

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588698 ◽

1996 ◽

Vol 14 (6) ◽

pp. 3933 ◽

Cited By ~ 6

Author(s):

P. J. A. Sazio

Keyword(s):

Epitaxial Growth ◽

Molecular Beam ◽

Three Dimensional ◽

Ion Beams ◽

Low Energy ◽

Focused Ion Beams ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

Molecular beam epitaxial growth of III‐V compound semiconductor in the presence of a low‐energy ion beam: A Monte Carlo simulation study

Applied Physics Letters ◽

10.1063/1.98829 ◽

1987 ◽

Vol 51 (11) ◽

pp. 837-839 ◽

Cited By ~ 10

Author(s):

S. B. Ogale ◽

A. Madhukar ◽

M. Thomsen

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Epitaxial Growth ◽

Molecular Beam ◽

Ion Beam ◽

Compound Semiconductor ◽

Low Energy ◽

Monte Carlo Simulation Study ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

Reactive molecular beam epitaxial growth and in situ photoemission spectroscopy study of iridate superlattices

AIP Advances ◽

10.1063/1.4986429 ◽

2017 ◽

Vol 7 (8) ◽

pp. 085307 ◽

Cited By ~ 1

Author(s):

C. C. Fan ◽

Z. T. Liu ◽

S. H. Cai ◽

Z. Wang ◽

P. Xiang ◽

...

Keyword(s):

Epitaxial Growth ◽

Molecular Beam ◽

Photoemission Spectroscopy ◽

Spectroscopy Study ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

In situ scanning tunneling microscopy of InAs quantum dots on GaAs() during molecular beam epitaxial growth

Surface Science ◽

10.1016/j.susc.2003.08.021 ◽

2003 ◽

Vol 544 (2-3) ◽

pp. 234-240 ◽

Cited By ~ 13

Author(s):

G.R. Bell ◽

M. Pristovsek ◽

S. Tsukamoto ◽

B.G. Orr ◽

Y. Arakawa ◽

...

Keyword(s):

Quantum Dots ◽

Scanning Tunneling Microscopy ◽

Epitaxial Growth ◽

Molecular Beam ◽

Scanning Tunneling ◽

Tunneling Microscopy ◽

Inas Quantum Dots ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text

In situ x-ray and electron scattering studies of oxide molecular beam epitaxial growth

APL Materials ◽

10.1063/5.0025849 ◽

2020 ◽

Vol 8 (10) ◽

pp. 101107

Author(s):

Xi Yan ◽

Friederike Wrobel ◽

Yan Li ◽

Hua Zhou ◽

Huan-hua Wang ◽

...

Keyword(s):

Epitaxial Growth ◽

Electron Scattering ◽

Molecular Beam ◽

X Ray ◽

Molecular Beam Epitaxial ◽

Molecular Beam Epitaxial Growth

Download Full-text