Use of very low energy in situ focused ion beams for three-dimensional dopant patterning during molecular beam epitaxial growth

1996 ◽  
Vol 14 (6) ◽  
pp. 3933 ◽  
Author(s):  
P. J. A. Sazio
Keyword(s):  
Epitaxial Growth ◽  
Molecular Beam ◽  
Three Dimensional ◽  
Ion Beams ◽  
Low Energy ◽  
Focused Ion Beams ◽  
Molecular Beam Epitaxial ◽  
Molecular Beam Epitaxial Growth

scholarly journals In situ x-ray and electron scattering studies of oxide molecular beam epitaxial growth

APL Materials ◽  
2020 ◽  
Vol 8 (10) ◽  
pp. 101107
Author(s):  
Xi Yan ◽  
Friederike Wrobel ◽  
Yan Li ◽  
Hua Zhou ◽  
Huan-hua Wang ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Electron Scattering ◽  
Molecular Beam ◽  
X Ray ◽  
Molecular Beam Epitaxial ◽  
Molecular Beam Epitaxial Growth

Reflectance and photoreflectance for in-situ monitoring of the molecular beam epitaxial growth of CdTe and Hg-based materials

1995 ◽  
Vol 24 (5) ◽  
pp. 685-690 ◽  
Author(s):  
Zhonghai Yu ◽  
M. A. Mattson ◽  
T. H. Myers ◽  
K. A. Harris ◽  
R. W. Yanka ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Molecular Beam ◽  
In Situ Monitoring ◽  
Molecular Beam Epitaxial ◽  
Molecular Beam Epitaxial Growth
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