Quantitative measurement of two-dimensional dopant profile by cross-sectional scanning capacitance microscopy
1997 ◽
Vol 15
(4)
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pp. 1011
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1996 ◽
Vol 14
(3)
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pp. 1168-1171
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1998 ◽
Vol 16
(1)
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pp. 339
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2007 ◽
Vol 73
(727)
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pp. 661-668
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2011 ◽
Vol 28
(8)
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pp. 899-906
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2018 ◽
Vol 26
(7)
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pp. 920-923
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