Junction metrology by cross-sectional atomic force microscopy

1996 ◽  
Vol 14 (1) ◽  
pp. 452 ◽  
Author(s):  
Roger Alvis
Keyword(s):  
Atomic Force Microscopy ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Atomic Force

Cross-sectional atomic force microscopy of ZnMgSSe- and BeMgZnSe-based laser diodes

1999 ◽  
Vol 75 (17) ◽  
pp. 2626-2628 ◽  
Author(s):  
A. V. Ankudinov ◽  
A. N. Titkov ◽  
T. V. Shubina ◽  
S. V. Ivanov ◽  
P. S. Kop’ev ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Laser Diodes ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Atomic Force

Cross-sectional observation of NaClO stain-etched Al0.5Ga0.5As/GaAs multilayer by atomic force microscopy

1995 ◽  
Vol 30 (3) ◽  
pp. 678-682 ◽  
Author(s):  
Hee Jeen Kim ◽  
Jae Sung Kim ◽  
Yong Kim ◽  
Moo Sung Kim ◽  
Suk-Ki Min
Keyword(s):  
Atomic Force Microscopy ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Atomic Force

Chemical and Structural Analysis of Nitridated Sapphire

1997 ◽  
Vol 482 ◽  
Author(s):  
Y. Cho ◽  
S. Rouvimov ◽  
Y. Kim ◽  
Z. Liliental-Weber ◽  
E. R. Weber
Keyword(s):  
Electron Microscopy ◽  
Atomic Force Microscopy ◽  
Structural Analysis ◽  
Photoelectron Spectroscopy ◽  
High Resolution Electron Microscopy ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Sapphire Substrates ◽  
Atomic Force ◽  
Resolution Electron

AbstractThe incorporation of nitrogen into sapphire substrates during nitridation was studied by xray photoelectron spectroscopy (XPS). An increase in the intensity of nitrogen 1s peak in XPS was observed upon longer nitridation. The surface morphology of the substrates was characterized by atomic force microscopy (AFM). High resolution electron microscopy (HREM) was employed for structural analysis. The cross sectional TEM showed a thin layer of AlN buried between amorphous AlNxO1−x and sapphire. This is the first direct observation of AlN on sapphire. The TEM images show a deeper penetration depth of nitrogen into a longer nitridated sapphire.

Electron-Beam-Induced Carbon Contamination on Silicon: Characterization Using Raman Spectroscopy and Atomic Force Microscopy

2009 ◽  
Vol 16 (1) ◽  
pp. 13-20 ◽  
Author(s):  
Deborah Lau ◽  
Anthony E. Hughes ◽  
Tim H. Muster ◽  
Timothy J. Davis ◽  
A. Matthew Glenn
Keyword(s):  
Raman Spectroscopy ◽  
Atomic Force Microscopy ◽  
Electron Beam ◽  
Prolonged Exposure ◽  
Carbon Film ◽  
Field Enhancement ◽  
Film Deposition ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Atomic Force

AbstractElectron-beam-induced carbon film deposition has long been recognized as a side effect of scanning electron microscopy. To characterize the nature of this type of contamination, silicon wafers were subjected to prolonged exposure to 15 kV electron beam energy with a probe current of ∼300 pA. Using Raman spectroscopy, the deposited coating was identified as an amorphous carbon film with an estimated crystallite size of 125 Å. Using atomic force microscopy, the cross-sectional profile of the coating was found to be raised and textured, indicative of the beam raster pattern. A map of the Raman intensity across the coating showed increased intensity along the edges and at the corner of the film. The intensity profile was in excess of that which could be explained by thickness alone. The enhancement was found to correspond with a modeled local field enhancement induced by the coating boundary and showed that the deposited carbon coating generated a localized disturbance in the opto-electrical properties of the substrate, which is compared and contrasted with Raman edge enhancement that is produced by surface structure in silicon.

scholarly journals Thin Film Thickness and Grain Structure Determination of Ferroelectric SrBi2Ta2O9 with Cross-Sectional Atomic Force Microscopy

2002 ◽  
Vol 8 (S02) ◽  
pp. 774-775
Author(s):  
D.L. Pechkis ◽  
C. Caragianis-Broadbridge ◽  
A.H. Lehman ◽  
K. L. Klein ◽  
J.-P. Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Force Microscopy ◽  
Film Thickness ◽  
Structure Determination ◽  
Grain Structure ◽  
Thin Film Thickness ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Atomic Force

Visualization of buried SiGe quantum dots at cleavages by cross-sectional atomic force microscopy

2004 ◽  
Vol 85 (11) ◽  
pp. 1999-2001 ◽  
Author(s):  
M. S. Dunaevskii ◽  
A. N. Titkov ◽  
Z. F. Krasilnik ◽  
A. V. Novikov ◽  
D. N. Lobanov ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Atomic Force Microscopy ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Atomic Force

Epitaxial layer thickness measurement by cross‐sectional atomic force microscopy

1996 ◽  
Vol 68 (23) ◽  
pp. 3353-3355 ◽  
Author(s):  
A. J. Howard ◽  
O. Blum ◽  
H. Chui ◽  
A. G. Baca ◽  
M. H. Crawford
Keyword(s):  
Atomic Force Microscopy ◽  
Layer Thickness ◽  
Epitaxial Layer ◽  
Thickness Measurement ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Atomic Force

Cross-Sectional Imaging of Boundary Lubrication Layer Formed by Fatty Acid by Means of Frequency-Modulation Atomic Force Microscopy

Langmuir ◽  
2017 ◽  
Vol 33 (40) ◽  
pp. 10492-10500 ◽  
Author(s):  
Tomoko Hirayama ◽  
Ryota Kawamura ◽  
Keita Fujino ◽  
Takashi Matsuoka ◽  
Hiroshi Komiya ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Fatty Acid ◽  
Boundary Lubrication ◽  
Frequency Modulation ◽  
Cross Sectional ◽  
Force Microscopy ◽  
Atomic Force ◽  
Lubrication Layer ◽  
Cross Sectional Imaging ◽  
Sectional Imaging
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