Thermal stability of highly Sb-doped molecular beam epitaxy silicon grown at low temperatures: Structural and electrical characterization

Author(s):  
E. V. Thomsen
2002 ◽  
Vol 299 (1) ◽  
pp. 79-84 ◽  
Author(s):  
M Xu ◽  
C.X Liu ◽  
H.F Liu ◽  
G.M Luo ◽  
X.M Chen ◽  
...  

2004 ◽  
Vol 84 (14) ◽  
pp. 2620-2622 ◽  
Author(s):  
X. B. Lu ◽  
X. Zhang ◽  
R. Huang ◽  
H. B. Lu ◽  
Z. H. Chen ◽  
...  

1985 ◽  
Vol 58 (10) ◽  
pp. 3766-3774 ◽  
Author(s):  
Nozomu Watanabe ◽  
Keisuke L. I. Kobayashi ◽  
Tadashi Narusawa ◽  
Hisao Nakashima

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