Negative-tone deep-ultraviolet resists containing benzylic crosslinkers: Experimental and simulation studies of the crosslinking process
1994 ◽
Vol 12
(6)
◽
pp. 3851
◽
1994 ◽
Vol 12
(1)
◽
pp. 44
◽
1999 ◽
Vol 15
(2)
◽
pp. 91-98
◽
1988 ◽
Vol 49
(C5)
◽
pp. C5-327-C5-336
◽